Specific Process Knowledge/Lithography/EBeamLithography: Revision history

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curprev 09:2109:21, 13 February 2024‎ Thope talk contribs‎ 23,323 bytes +22‎ →‎Substrate preparation

curprev 13:1513:15, 5 February 2024‎ Thope talk contribs‎ 23,301 bytes +1‎ →‎Substrate preparation
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curprev 23:0423:04, 4 December 2023‎ Thope talk contribs‎ 22,649 bytes −1‎ →‎JEOL 9500 and Raith eLine Plus specifications

curprev 14:4214:42, 23 November 2023‎ Thope talk contribs‎ 22,650 bytes −211‎ →‎Substrate preparation Tag: Manual revert
curprev 14:4114:41, 23 November 2023‎ Thope talk contribs‎ 22,861 bytes +211‎ →‎Substrate preparation

curprev 08:5208:52, 14 November 2023‎ Thope talk contribs‎ 22,173 bytes +32‎ No edit summary
curprev 08:5008:50, 14 November 2023‎ Thope talk contribs‎ 22,141 bytes −82‎ No edit summary

curprev 16:0716:07, 10 November 2023‎ Thope talk contribs‎ 22,223 bytes 0‎ →‎JEOL 9500 and Raith eLine Plus specifications

curprev 14:0414:04, 8 November 2023‎ Thope talk contribs‎ 22,223 bytes +1‎ No edit summary
curprev 14:0414:04, 8 November 2023‎ Thope talk contribs‎ 22,222 bytes +39‎ No edit summary

curprev 11:1911:19, 6 November 2023‎ Thope talk contribs‎ 22,183 bytes +108‎ →‎Quick links

curprev 16:2116:21, 18 October 2023‎ Thope talk contribs‎ 22,075 bytes +94‎ →‎Quick links
curprev 16:1916:19, 18 October 2023‎ Thope talk contribs‎ 21,981 bytes −121‎ →‎Quick links

curprev 11:0811:08, 22 September 2023‎ Thope talk contribs‎ 22,102 bytes +1‎ →‎Quick links
curprev 11:0711:07, 22 September 2023‎ Thope talk contribs‎ 22,101 bytes +94‎ →‎Quick links

curprev 12:5512:55, 8 September 2023‎ Thope talk contribs‎ 22,007 bytes +79‎ →‎EBL process examples
curprev 12:4912:49, 8 September 2023‎ Thope talk contribs‎ 21,928 bytes +80‎ No edit summary
curprev 11:4011:40, 8 September 2023‎ Thope talk contribs‎ 21,848 bytes −283‎ →‎Introduction to E-beam lithography at DTU Nanolab
curprev 11:3811:38, 8 September 2023‎ Thope talk contribs‎ 22,131 bytes −77‎ →‎JEOL 9500 and Raith eLine Plus specifications

curprev 08:4608:46, 28 August 2023‎ Thope talk contribs‎ 22,208 bytes +12,342‎ No edit summary

curprev 14:4414:44, 10 May 2023‎ Jehem talk contribs‎ 9,866 bytes −45‎ No edit summary

curprev 11:2711:27, 17 February 2023‎ Thope talk contribs‎ 9,911 bytes −18‎ →‎Exposure Tag: Manual revert
curprev 11:2711:27, 17 February 2023‎ Thope talk contribs‎ 9,929 bytes +18‎ →‎Development
curprev 11:1511:15, 17 February 2023‎ Thope talk contribs‎ 9,911 bytes −91‎ No edit summary

curprev 14:4614:46, 3 February 2023‎ Jehem talk contribs‎ 10,002 bytes −2,245‎ →‎E-beam resists
curprev 14:4514:45, 3 February 2023‎ Jehem talk contribs‎ 12,247 bytes +64‎ No edit summary

curprev 11:1411:14, 31 January 2023‎ Jehem talk contribs‎ 12,183 bytes +76‎ No edit summary

curprev 16:1616:16, 26 January 2023‎ Jehem talk contribs‎ 12,107 bytes −6,741‎ →‎E-beam resists

curprev 20:3420:34, 6 September 2022‎ Thope talk contribs‎ 20,165 bytes 0‎ →‎Proximity Error Correction (PEC) in BEAMER
curprev 20:3420:34, 6 September 2022‎ Thope talk contribs‎ 20,165 bytes +66‎ →‎Proximity Error Correction (PEC) in BEAMER
curprev 16:2116:21, 6 September 2022‎ Thope talk contribs‎ 20,099 bytes +59‎ →‎Development
curprev 16:2016:20, 6 September 2022‎ Thope talk contribs‎ 20,040 bytes −1,461‎ →‎Development

curprev 21:5921:59, 24 February 2022‎ Thope talk contribs‎ 21,327 bytes +51‎ →‎E-beam resists and Process flow
curprev 09:3009:30, 24 February 2022‎ Thope talk contribs‎ 21,276 bytes +266‎ No edit summary

curprev 10:2610:26, 22 December 2020‎ Taran talk contribs‎ 21,010 bytes +82‎ No edit summary

curprev 16:3116:31, 16 June 2020‎ Lgpe talk contribs‎ 20,928 bytes +17‎ →‎Performance of the e-beam writers at DTU Nanolab

curprev 11:4611:46, 26 March 2020‎ Taran talk contribs‎ 20,911 bytes −8‎ →‎E-beam resists
curprev 11:4211:42, 26 March 2020‎ Taran talk contribs‎ 20,919 bytes −4‎ →‎Development
curprev 11:3811:38, 26 March 2020‎ Taran talk contribs‎ 20,923 bytes +3‎ →‎Cold development

curprev 17:5417:54, 13 March 2020‎ Thope talk contribs‎ 20,920 bytes +412‎ No edit summary

curprev 15:1415:14, 24 February 2020‎ Lgpe talk contribs‎ 20,508 bytes 0‎ →‎E-beam resists in the cleanroom

curprev 10:5610:56, 26 November 2019‎ Taran talk contribs‎ 20,508 bytes 0‎ →‎E-beam resists in the cleanroom

curprev 10:4710:47, 15 May 2018‎ Lgpe talk contribs‎ m 17,615 bytes 0‎ →‎Performance of the e-beam writers at DTU Danchip
curprev 10:4610:46, 15 May 2018‎ Lgpe talk contribs‎ m 17,615 bytes +13‎ →‎Performance of the e-beam writers at DTU Danchip

curprev 14:0214:02, 26 October 2017‎ Bghe talk contribs‎ 17,400 bytes +2‎ No edit summary
curprev 14:0014:00, 26 October 2017‎ Bghe talk contribs‎ 17,398 bytes −40‎ →‎E-beam resists and Process flow
curprev 13:5813:58, 26 October 2017‎ Bghe talk contribs‎ 17,438 bytes +77‎ →‎E-beam resists and Process flow

curprev 07:2807:28, 23 October 2017‎ Bincha talk contribs‎ 17,361 bytes +39‎ →‎E-beam resists and Process flow

curprev 12:5912:59, 26 July 2017‎ Lgpe talk contribs‎ m 17,322 bytes +225‎ →‎E-beam resists and Process flow

curprev 10:5110:51, 10 January 2017‎ Lgpe talk contribs‎ m 17,097 bytes +73‎ →‎E-beam resists in the cleanroom
curprev 10:4910:49, 10 January 2017‎ Lgpe talk contribs‎ m 17,024 bytes +11‎ →‎E-beam resists in the cleanroom

curprev 16:3316:33, 21 November 2016‎ Thes talk contribs‎ 17,013 bytes +162‎ No edit summary

curprev 11:5911:59, 18 October 2016‎ Lgpe talk contribs‎ m 16,851 bytes +34‎ →‎E-beam resists and Process flow
curprev 11:5511:55, 18 October 2016‎ Lgpe talk contribs‎ m 16,817 bytes +1‎ →‎E-beam resists in the cleanroom
curprev 11:5511:55, 18 October 2016‎ Lgpe talk contribs‎ m 16,816 bytes +45‎ →‎E-beam resists in the cleanroom
curprev 11:5311:53, 18 October 2016‎ Lgpe talk contribs‎ m 16,771 bytes 0‎ →‎E-beam resists in the cleanroom

curprev 14:0614:06, 16 August 2016‎ Tigre talk contribs‎ 16,655 bytes −1‎ →‎E-beam resists and Process flow

curprev 13:3913:39, 14 July 2016‎ Tigre talk contribs‎ 16,656 bytes +88‎ →‎E-beam resists in the cleanroom

curprev 13:0613:06, 23 June 2016‎ Tigre talk contribs‎ 16,568 bytes +96‎ →‎E-beam resists and Process flow

curprev 16:1016:10, 19 May 2016‎ Tigre talk contribs‎ 14,438 bytes −91‎ →‎E-beam resists and Process Flows

curprev 16:1016:10, 18 May 2016‎ Tigre talk contribs‎ 14,529 bytes −5‎ →‎E-beam resists and Process Flows
curprev 16:0816:08, 18 May 2016‎ Tigre talk contribs‎ 14,534 bytes +102‎ →‎E-beam resists and Process Flows

curprev 16:5116:51, 7 March 2016‎ Tigre talk contribs‎ 14,432 bytes −43‎ →‎E-beam resists and Process Flows
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curprev 16:4916:49, 7 March 2016‎ Tigre talk contribs‎ 14,474 bytes −2‎ →‎E-beam resists and Process Flows
curprev 16:4816:48, 7 March 2016‎ Tigre talk contribs‎ 14,476 bytes +142‎ →‎E-beam resists and Process Flows

curprev 15:4715:47, 15 February 2016‎ Wiltid talk contribs‎ m 14,334 bytes +1‎ →‎Performance of the e-beam writers at DTU Danchip

curprev 18:3818:38, 14 February 2016‎ Wiltid talk contribs‎ m 14,333 bytes −1‎ →‎Performance of the e-beam writers at DTU Danchip

curprev 18:1018:10, 12 February 2016‎ Wiltid talk contribs‎ 14,334 bytes +33‎ →‎Performance of the e-beam writers at DTU Danchip
curprev 18:0418:04, 12 February 2016‎ Wiltid talk contribs‎ 14,301 bytes +603‎ →‎Performance of the e-beam writers at DTU Danchip

curprev 13:0913:09, 3 February 2016‎ Tigre talk contribs‎ 13,698 bytes +71‎ →‎Performance of the e-beam writers at DTU Danchip
curprev 13:0013:00, 3 February 2016‎ Tigre talk contribs‎ 13,627 bytes +46‎ →‎Performance of the e-beam writers at DTU Danchip

curprev 13:5213:52, 30 November 2015‎ Tigre talk contribs‎ 19,232 bytes −11‎ →‎Aluminum coating

curprev 13:0813:08, 3 November 2015‎ Tigre talk contribs‎ 19,243 bytes −1‎ →‎Getting started
curprev 13:0813:08, 3 November 2015‎ Tigre talk contribs‎ 19,244 bytes +449‎ →‎Getting started

curprev 14:4014:40, 2 November 2015‎ Tigre talk contribs‎ 18,795 bytes −2‎ →‎Cassettes

curprev 15:0815:08, 30 October 2015‎ Tigre talk contribs‎ 18,797 bytes +48‎ →‎E-beam resists and Process Flows

curprev 13:1013:10, 28 September 2015‎ Tigre talk contribs‎ 25,064 bytes +16‎ →‎Performance of the e-beam writer

curprev 14:2714:27, 18 September 2015‎ Tigre talk contribs‎ 25,048 bytes −84‎ No edit summary

curprev 11:1311:13, 7 September 2015‎ Tigre talk contribs‎ 25,132 bytes 0‎ →‎E-beam resists and Process Flows

curprev 14:5314:53, 1 September 2015‎ Tigre talk contribs‎ 25,132 bytes +15‎ No edit summary

curprev 09:4109:41, 25 August 2015‎ Tigre talk contribs‎ 25,117 bytes +3‎ →‎Getting started
curprev 09:4009:40, 25 August 2015‎ Tigre talk contribs‎ 25,114 bytes −1‎ →‎Getting started
curprev 09:4009:40, 25 August 2015‎ Tigre talk contribs‎ 25,115 bytes −1‎ →‎Getting started
curprev 09:4009:40, 25 August 2015‎ Tigre talk contribs‎ 25,116 bytes −9‎ No edit summary

curprev 21:3421:34, 10 August 2015‎ Tigre talk contribs‎ 25,125 bytes 0‎ →‎Cassettes
curprev 21:3321:33, 10 August 2015‎ Tigre talk contribs‎ 25,125 bytes +16‎ →‎Alignment of exposure to existing pattern on wafer

curprev 09:3009:30, 30 June 2015‎ Tigre talk contribs‎ 25,095 bytes +13‎ →‎Performance of the e-beam writer
curprev 09:3009:30, 30 June 2015‎ Tigre talk contribs‎ 25,082 bytes −27‎ →‎Performance of the e-beam writer
curprev 09:3009:30, 30 June 2015‎ Tigre talk contribs‎ 25,109 bytes +30‎ →‎Performance of the e-beam writer
curprev 09:2809:28, 30 June 2015‎ Tigre talk contribs‎ 25,079 bytes +16‎ No edit summary

curprev 11:1411:14, 29 June 2015‎ Tigre talk contribs‎ 25,063 bytes +14‎ No edit summary
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curprev 11:4811:48, 25 June 2015‎ Tigre talk contribs‎ 24,932 bytes +4‎ →‎E-beam resists and Process Flows
curprev 11:4711:47, 25 June 2015‎ Tigre talk contribs‎ 24,928 bytes +69‎ →‎E-beam resists and Process Flows
curprev 11:4611:46, 25 June 2015‎ Tigre talk contribs‎ 24,859 bytes −201‎ →‎E-beam resists and Process Flows

curprev 12:4212:42, 23 June 2015‎ Tigre talk contribs‎ 25,060 bytes +48‎ →‎Cassettes

curprev 14:5714:57, 17 June 2015‎ Tigre talk contribs‎ 23,396 bytes −141‎ No edit summary

curprev 11:1411:14, 12 May 2015‎ Bghe talk contribs‎ 23,537 bytes +34‎ No edit summary

curprev 08:4708:47, 28 April 2015‎ Tigre talk contribs‎ 23,503 bytes +2‎ →‎Overlay accuracy (layer to layer stitching)
curprev 08:4708:47, 28 April 2015‎ Tigre talk contribs‎ 23,501 bytes +1‎ →‎Field stitching

curprev 10:4310:43, 28 January 2015‎ Taran talk contribs‎ 20,600 bytes −4‎ →‎General Rules
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curprev 10:2810:28, 28 January 2015‎ Taran talk contribs‎ 20,529 bytes +6‎ →‎General Rules

curprev 15:3815:38, 12 January 2015‎ Tigre talk contribs‎ 20,523 bytes 0‎ →‎E-beam resists and Process Flows

curprev 14:3314:33, 8 January 2015‎ Tigre talk contribs‎ 20,523 bytes +34‎ →‎E-beam resists and Process Flows

curprev 23:5423:54, 5 December 2014‎ Tigre talk contribs‎ 20,489 bytes −1‎ →‎Proximity Error Correction (PEC) in BEAMER

curprev 14:3414:34, 26 November 2014‎ Tigre talk contribs‎ 20,490 bytes +204‎ →‎Alignment of exposure to existing pattern on wafer

curprev 11:1211:12, 23 October 2014‎ Taran talk contribs‎ 19,614 bytes 0‎ No edit summary

curprev 14:4214:42, 16 September 2014‎ Tigre talk contribs‎ 18,772 bytes +18‎ →‎Alignment of exposure to existing pattern on wafer
curprev 14:4014:40, 16 September 2014‎ Tigre talk contribs‎ 18,754 bytes +597‎ →‎E-beam resists and Process Flows

curprev 19:5419:54, 4 September 2014‎ Tigre talk contribs‎ 17,638 bytes +125‎ No edit summary

curprev 09:0509:05, 21 August 2014‎ Tigre talk contribs‎ 17,513 bytes −10‎ →‎E-beam resists and Process Flows

curprev 10:0110:01, 11 July 2014‎ Tigre talk contribs‎ 17,523 bytes −5‎ →‎E-beam resists and Process Flows

curprev 12:2212:22, 10 July 2014‎ Tigre talk contribs‎ 17,528 bytes +1‎ →‎E-beam resists and Process Flows
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curprev 10:1210:12, 10 July 2014‎ Tigre talk contribs‎ 17,528 bytes −1,715‎ →‎Charging of non-conductive substrates and height measurements on transparent substrates

curprev 10:2310:23, 7 July 2014‎ Tigre talk contribs‎ 18,028 bytes −4‎ →‎E-beam resists and Process Flows
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curprev 08:5608:56, 21 May 2014‎ Tigre talk contribs‎ 17,553 bytes +13‎ →‎E-beam resists and Process Flows

curprev 13:2013:20, 9 April 2014‎ Tigre talk contribs‎ 16,631 bytes +38‎ →‎E-beam resists and Process Flows
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curprev 15:3915:39, 14 March 2014‎ Tigre talk contribs‎ 16,583 bytes −2‎ →‎General Rules

curprev 15:3815:38, 19 February 2014‎ Bghe talk contribs‎ 16,585 bytes −50‎ No edit summary
curprev 15:3615:36, 19 February 2014‎ Bghe talk contribs‎ 16,635 bytes +397‎ No edit summary

curprev 14:1114:11, 16 September 2013‎ Tigre talk contribs‎ 16,238 bytes 0‎ No edit summary
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curprev 10:0510:05, 13 September 2013‎ Tigre talk contribs‎ 16,236 bytes +50‎ →‎Charging of non-conductive substrates

curprev 08:3108:31, 4 September 2013‎ Tigre talk contribs‎ 15,798 bytes +5‎ →‎E-beam resists and Process Flows
curprev 08:2908:29, 4 September 2013‎ Tigre talk contribs‎ 15,793 bytes +79‎ →‎E-beam resists and Process Flows

curprev 10:2410:24, 28 August 2013‎ Tigre talk contribs‎ 15,714 bytes −2‎ →‎Getting started
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curprev 14:2214:22, 22 August 2013‎ Tigre talk contribs‎ 15,492 bytes 0‎ →‎E-beam resists and Process Flows
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curprev 11:3911:39, 20 August 2013‎ Tigre talk contribs‎ 15,493 bytes +97‎ →‎E-beam resists and Process Flows

curprev 12:0312:03, 8 August 2013‎ Tigre talk contribs‎ 14,739 bytes +1‎ →‎Proximity Error Correction top of this page

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Specific Process Knowledge/Lithography/EBeamLithography: Revision history

13 February 2024

5 February 2024

12 December 2023

4 December 2023

23 November 2023

20 November 2023

14 November 2023

10 November 2023

8 November 2023

6 November 2023

18 October 2023

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28 August 2023

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8 September 2022

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1 July 2022

24 February 2022

22 December 2020

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13 March 2020

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26 November 2019

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26 October 2017

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26 July 2017

10 January 2017

21 November 2016

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14 July 2016

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18 May 2016

7 March 2016

15 February 2016

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12 February 2016

3 February 2016

28 January 2016

30 November 2015

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30 October 2015

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