Specific Process Knowledge/Lithography/EBL: Revision history

22 April 2024

• curprev 11:4411:44, 22 April 2024‎ Thope talk contribs‎ 21,924 bytes −1‎ →‎JEOL 9500 and Raith eLine Plus specifications

12 December 2023

• curprev 13:3413:34, 12 December 2023‎ Thope talk contribs‎ 21,925 bytes −283‎ →‎Introduction to E-beam lithography at DTU Nanolab

15 August 2023

• curprev 12:4912:49, 15 August 2023‎ Thope talk contribs‎ 22,208 bytes −1‎ →‎Job execution
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• curprev 12:4212:42, 15 August 2023‎ Thope talk contribs‎ 22,117 bytes +97‎ →‎Substrate preparation
• curprev 12:2012:20, 15 August 2023‎ Thope talk contribs‎ 22,020 bytes −3‎ →‎Electron exposure
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• curprev 11:5211:52, 15 August 2023‎ Thope talk contribs‎ 20,867 bytes +13‎ →‎Electron exposure
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• curprev 11:4711:47, 15 August 2023‎ Thope talk contribs‎ 20,853 bytes 0‎ →‎Electron exposure
• curprev 11:4611:46, 15 August 2023‎ Thope talk contribs‎ 20,853 bytes +291‎ →‎Electron exposure
• curprev 10:4810:48, 15 August 2023‎ Thope talk contribs‎ 20,562 bytes +588‎ →‎Fundementals of EBL pattern writing

6 May 2023

• curprev 09:2209:22, 6 May 2023‎ Thope talk contribs‎ 19,974 bytes +94‎ →‎Quick links

22 April 2023

• curprev 01:1301:13, 22 April 2023‎ Thope talk contribs‎ 19,880 bytes −56‎ →‎Introduction to E-beam lithography at DTU Nanolab Tag: Manual revert
• curprev 01:1201:12, 22 April 2023‎ Thope talk contribs‎ 19,936 bytes +56‎ →‎Introduction to E-beam lithography at DTU Nanolab
• curprev 01:1001:10, 22 April 2023‎ Thope talk contribs‎ 19,880 bytes −72‎ →‎Introduction to E-beam lithography at DTU Nanolab Tag: Manual revert
• curprev 01:1001:10, 22 April 2023‎ Thope talk contribs‎ 19,952 bytes +72‎ →‎Introduction to E-beam lithography at DTU Nanolab
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• curprev 01:0801:08, 22 April 2023‎ Thope talk contribs‎ 20,142 bytes +262‎ →‎Introduction to E-beam lithography at DTU Nanolab

18 April 2023

• curprev 12:4812:48, 18 April 2023‎ Thope talk contribs‎ 19,880 bytes −248‎ →‎Beam pitch, beam current and exposure dose relationship
• curprev 12:4712:47, 18 April 2023‎ Thope talk contribs‎ 20,128 bytes +359‎ →‎Beam pitch, beam current and exposure dose relationship
• curprev 08:2908:29, 18 April 2023‎ Thope talk contribs‎ 19,769 bytes +80‎ →‎Beam pitch, beam current and exposure dose relationship
• curprev 08:2808:28, 18 April 2023‎ Thope talk contribs‎ 19,689 bytes 0‎ →‎Beam pitch, beam current and exposure dose relationship Tag: Manual revert
• curprev 08:2808:28, 18 April 2023‎ Thope talk contribs‎ 19,689 bytes 0‎ →‎Beam pitch, beam current and exposure dose relationship
• curprev 08:2708:27, 18 April 2023‎ Thope talk contribs‎ 19,689 bytes 0‎ →‎Beam pitch, beam current and exposure dose relationship
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• curprev 08:1308:13, 18 April 2023‎ Thope talk contribs‎ 19,486 bytes +26‎ →‎Generalized workflow
• curprev 08:1108:11, 18 April 2023‎ Thope talk contribs‎ 19,460 bytes +3,454‎ →‎Exposure grid and exposure field

17 April 2023

• curprev 16:1716:17, 17 April 2023‎ Thope talk contribs‎ 16,006 bytes +8‎ →‎Exposure grid and exposure field

13 April 2023

• curprev 15:3015:30, 13 April 2023‎ Thope talk contribs‎ 15,998 bytes +904‎ →‎Exposure grid and exposure field
• curprev 14:5114:51, 13 April 2023‎ Thope talk contribs‎ 15,094 bytes +84‎ →‎Exposure grid and exposure field
• curprev 13:1613:16, 13 April 2023‎ Thope talk contribs‎ 15,010 bytes +22‎ →‎Exposure grid and exposure field
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• curprev 13:1313:13, 13 April 2023‎ Thope talk contribs‎ 14,896 bytes 0‎ →‎Exposure grid and exposure field Tag: Manual revert
• curprev 13:1213:12, 13 April 2023‎ Thope talk contribs‎ 14,896 bytes 0‎ →‎Exposure grid and exposure field
• curprev 13:1213:12, 13 April 2023‎ Thope talk contribs‎ 14,896 bytes 0‎ →‎Exposure grid and exposure field
• curprev 13:1213:12, 13 April 2023‎ Thope talk contribs‎ 14,896 bytes 0‎ →‎Exposure grid and exposure field
• curprev 13:1213:12, 13 April 2023‎ Thope talk contribs‎ 14,896 bytes +205‎ →‎Exposure grid and exposure field
• curprev 13:1113:11, 13 April 2023‎ Thope talk contribs‎ 14,691 bytes +421‎ →‎Exposure grid
• curprev 10:0710:07, 13 April 2023‎ Thope talk contribs‎ 14,270 bytes +310‎ →‎Exposure grid
• curprev 09:5009:50, 13 April 2023‎ Thope talk contribs‎ 13,960 bytes +81‎ →‎Writing principle
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• curprev 08:2808:28, 13 April 2023‎ Thope talk contribs‎ 13,912 bytes +17‎ →‎Writing principle
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• curprev 08:2408:24, 13 April 2023‎ Thope talk contribs‎ 13,767 bytes 0‎ →‎Writing principle
• curprev 08:2408:24, 13 April 2023‎ Thope talk contribs‎ 13,767 bytes 0‎ →‎Writing principle
• curprev 08:2408:24, 13 April 2023‎ Thope talk contribs‎ 13,767 bytes +213‎ →‎Writing principle

11 April 2023

• curprev 22:5122:51, 11 April 2023‎ Thope talk contribs‎ 13,554 bytes −38‎ No edit summary
• curprev 22:2322:23, 11 April 2023‎ Thope talk contribs‎ 13,592 bytes +398‎ →‎Fundementals of EBL pattern writing

10 April 2023

• curprev 17:0317:03, 10 April 2023‎ Thope talk contribs‎ 13,194 bytes +97‎ →‎Fundementals of EBL pattern writing
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• curprev 17:0217:02, 10 April 2023‎ Thope talk contribs‎ 13,090 bytes +85‎ →‎Fundementals of EBL pattern writing
• curprev 17:0017:00, 10 April 2023‎ Thope talk contribs‎ 13,005 bytes −3‎ →‎Fundementals of EBL pattern writing
• curprev 17:0017:00, 10 April 2023‎ Thope talk contribs‎ 13,008 bytes +532‎ →‎Fundementals of EBL pattern writing
• curprev 16:5416:54, 10 April 2023‎ Thope talk contribs‎ 12,476 bytes +575‎ →‎Introduction to E-beam lithography at DTU Nanolab

8 April 2023

• curprev 14:1614:16, 8 April 2023‎ Thope talk contribs‎ 11,901 bytes +3‎ →‎Substrate preparation
• curprev 14:1414:14, 8 April 2023‎ Thope talk contribs‎ 11,898 bytes −10,636‎ →‎Substrate preparation
• curprev 14:1214:12, 8 April 2023‎ Thope talk contribs‎ 22,534 bytes +161‎ →‎Substrate preparation

28 March 2023

• curprev 20:2020:20, 28 March 2023‎ Thope talk contribs‎ 22,373 bytes +51‎ →‎Resist coating

27 March 2023

• curprev 22:5822:58, 27 March 2023‎ Thope talk contribs‎ 22,322 bytes +9‎ →‎Resist coating

14 March 2023

• curprev 12:2612:26, 14 March 2023‎ Thope talk contribs‎ 22,313 bytes +103‎ →‎Quick links

10 March 2023

• curprev 13:2913:29, 10 March 2023‎ Thope talk contribs‎ 22,210 bytes +81‎ →‎Quick links
• curprev 12:5812:58, 10 March 2023‎ Thope talk contribs‎ 22,129 bytes +4‎ →‎Getting started and training in E-Beam Lithography
• curprev 10:2010:20, 10 March 2023‎ Thope talk contribs‎ 22,125 bytes +16‎ →‎Quick links
• curprev 10:1910:19, 10 March 2023‎ Thope talk contribs‎ 22,109 bytes +105‎ →‎Quick links

28 February 2023

• curprev 09:3909:39, 28 February 2023‎ Thope talk contribs‎ 22,004 bytes +92‎ →‎Training in E-Beam Lithography

23 February 2023

• curprev 16:0216:02, 23 February 2023‎ Thope talk contribs‎ 21,912 bytes +5‎ →‎Quick links
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• curprev 13:5213:52, 23 February 2023‎ Thope talk contribs‎ 21,826 bytes +1‎ →‎Quick links
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• curprev 13:5013:50, 23 February 2023‎ Thope talk contribs‎ 21,801 bytes +84‎ →‎Quick links
• curprev 13:5013:50, 23 February 2023‎ Thope talk contribs‎ 21,717 bytes 0‎ →‎Quick links
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22 February 2023

• curprev 10:5210:52, 22 February 2023‎ Thope talk contribs‎ 21,610 bytes 0‎ No edit summary Tag: Manual revert
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17 February 2023

• curprev 11:3411:34, 17 February 2023‎ Thope talk contribs‎ 21,575 bytes +232‎ →‎Job execution
• curprev 11:3111:31, 17 February 2023‎ Thope talk contribs‎ 21,343 bytes +410‎ →‎Job preparation

12 February 2023

• curprev 18:0818:08, 12 February 2023‎ Thope talk contribs‎ 20,933 bytes 0‎ →‎Inspection
• curprev 18:0618:06, 12 February 2023‎ Thope talk contribs‎ 20,933 bytes −2,303‎ →‎Resist coating
• curprev 18:0518:05, 12 February 2023‎ Thope talk contribs‎ 23,236 bytes +2,404‎ →‎Resist coating

5 February 2023

• curprev 11:4011:40, 5 February 2023‎ Thope talk contribs‎ 20,832 bytes +58‎ →‎Training in E-Beam Lithography
• curprev 11:3511:35, 5 February 2023‎ Thope talk contribs‎ 20,774 bytes +357‎ →‎Introduction to E-beam lithography at DTU Nanolab

30 January 2023

• curprev 12:2912:29, 30 January 2023‎ Thope talk contribs‎ 20,417 bytes −8‎ →‎Pattern preparation
• curprev 12:2812:28, 30 January 2023‎ Thope talk contribs‎ 20,425 bytes +270‎ →‎Pattern preparation
• curprev 12:2512:25, 30 January 2023‎ Thope talk contribs‎ 20,155 bytes +176‎ →‎Pattern preparation
• curprev 12:2312:23, 30 January 2023‎ Thope talk contribs‎ 19,979 bytes −3‎ →‎Inspection
• curprev 12:0912:09, 30 January 2023‎ Thope talk contribs‎ 19,982 bytes −21‎ →‎Development
• curprev 12:0912:09, 30 January 2023‎ Thope talk contribs‎ 20,003 bytes −6‎ →‎Post development inspection
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• curprev 12:0312:03, 30 January 2023‎ Thope talk contribs‎ 19,805 bytes +781‎ →‎Development
• curprev 11:5511:55, 30 January 2023‎ Thope talk contribs‎ 19,024 bytes −745‎ →‎Charging of non-conductive substrates
• curprev 11:5511:55, 30 January 2023‎ Thope talk contribs‎ 19,769 bytes −1,477‎ →‎Proximity Error Correction (PEC)
• curprev 11:5411:54, 30 January 2023‎ Thope talk contribs‎ 21,246 bytes −1,557‎ →‎Charging of non-conductive substrates
• curprev 11:5411:54, 30 January 2023‎ Thope talk contribs‎ 22,803 bytes −1,016‎ →‎Proximity Error Correction
• curprev 11:5411:54, 30 January 2023‎ Thope talk contribs‎ 23,819 bytes −1,007‎ →‎Proximity Error Correction (PEC) in BEAMER
• curprev 11:5311:53, 30 January 2023‎ Thope talk contribs‎ 24,826 bytes −709‎ →‎Aluminum coating
• curprev 11:5211:52, 30 January 2023‎ Thope talk contribs‎ 25,535 bytes −273‎ →‎ESPACER
• curprev 11:5011:50, 30 January 2023‎ Thope talk contribs‎ 25,808 bytes −598‎ →‎Literature on E-beam Lithography
• curprev 11:5011:50, 30 January 2023‎ Thope talk contribs‎ 26,406 bytes −1,440‎ →‎Development
• curprev 11:4911:49, 30 January 2023‎ Thope talk contribs‎ 27,846 bytes −166‎ →‎Spin coating and resist information
• curprev 11:4811:48, 30 January 2023‎ Thope talk contribs‎ 28,012 bytes +96‎ →‎Development
• curprev 11:4611:46, 30 January 2023‎ Thope talk contribs‎ 27,916 bytes −3,734‎ →‎Introduction to E-beam lithography at DTU Nanolab
• curprev 11:4311:43, 30 January 2023‎ Thope talk contribs‎ 31,650 bytes −78‎ →‎Introduction to E-beam lithography at DTU Nanolab
• curprev 11:4211:42, 30 January 2023‎ Thope talk contribs‎ 31,728 bytes +4,366‎ →‎Electron-Beam Lithography at DTU Nanolab
• curprev 11:4211:42, 30 January 2023‎ Thope talk contribs‎ 27,362 bytes −4,409‎ →‎Introduction to E-beam lithography at DTU Nanolab
• curprev 11:3911:39, 30 January 2023‎ Thope talk contribs‎ 31,771 bytes +53‎ →‎Training in E-Beam Lithography
• curprev 11:3811:38, 30 January 2023‎ Thope talk contribs‎ 31,718 bytes −53‎ →‎Electron-Beam Lithography at DTU Nanolab
• curprev 11:3711:37, 30 January 2023‎ Thope talk contribs‎ 31,771 bytes −182‎ →‎Training in E-Beam Lithography
• curprev 11:3611:36, 30 January 2023‎ Thope talk contribs‎ 31,953 bytes −512‎ →‎Trilayer resist stack
• curprev 11:3511:35, 30 January 2023‎ Thope talk contribs‎ 32,465 bytes −1,460‎ →‎Cold development
• curprev 11:3111:31, 30 January 2023‎ Thope talk contribs‎ 33,925 bytes +20‎ →‎Development
• curprev 11:3111:31, 30 January 2023‎ Thope talk contribs‎ 33,905 bytes +13‎ →‎Inspection
• curprev 11:3011:30, 30 January 2023‎ Thope talk contribs‎ 33,892 bytes +7‎ →‎Inspection
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• curprev 11:2311:23, 30 January 2023‎ Thope talk contribs‎ 33,907 bytes −2,245‎ →‎User resist bottles in the cleanroom
• curprev 11:2311:23, 30 January 2023‎ Thope talk contribs‎ 36,152 bytes +1‎ →‎Resist coating
• curprev 11:2011:20, 30 January 2023‎ Thope talk contribs‎ 36,151 bytes +2‎ →‎Resist coating
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• curprev 11:1211:12, 30 January 2023‎ Thope talk contribs‎ 35,916 bytes 0‎ →‎Inspection
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• curprev 10:5010:50, 30 January 2023‎ Thope talk contribs‎ 35,745 bytes +6‎ →‎Inspection
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• curprev 10:1410:14, 30 January 2023‎ Thope talk contribs‎ 34,856 bytes +142‎ →‎Discharge layer application
• curprev 10:0910:09, 30 January 2023‎ Thope talk contribs‎ 34,714 bytes +55‎ →‎Resist coating
• curprev 10:0710:07, 30 January 2023‎ Thope talk contribs‎ 34,659 bytes −29‎ →‎Substrate preparation
• curprev 10:0710:07, 30 January 2023‎ Thope talk contribs‎ 34,688 bytes +21,773‎ No edit summary

18 March 2022

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17 March 2022

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• curprev 14:2914:29, 17 March 2022‎ Thope talk contribs‎ 20,258 bytes −144‎ →‎E-beam resists
• curprev 14:2914:29, 17 March 2022‎ Thope talk contribs‎ 20,402 bytes −194‎ →‎E-beam resists
• curprev 14:2814:28, 17 March 2022‎ Thope talk contribs‎ 20,596 bytes −53‎ →‎Brief system comparison of the e-beam writers at DTU Nanolab
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• curprev 12:3812:38, 17 March 2022‎ Thope talk contribs‎ 20,572 bytes −2‎ →‎Brief system comparison of the e-beam writers at DTU Nanolab
• curprev 12:3812:38, 17 March 2022‎ Thope talk contribs‎ 20,574 bytes +12‎ →‎Performance of the e-beam writers at DTU Nanolab
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• curprev 11:2611:26, 17 March 2022‎ Thope talk contribs‎ 21,327 bytes +21,327‎ Created page with "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Lit..."