Specific Process Knowledge/Lithography/Coaters/Spin Coater: Gamma DUV processing: Revision history

3 February 2023

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2 February 2023

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30 January 2023

• curprev 11:2911:29, 30 January 2023‎ Jehem talk contribs‎ 5,898 bytes +1,086‎ →‎Standard Processes
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• curprev 11:2811:28, 30 January 2023‎ Jehem talk contribs‎ 2,641 bytes +2,641‎ Created page with "=General Process Information= Processing using Spin Coater: Süss stepper is divided into two parts: *Spin coating *Soft baking ==Spin coating== The process of spin coating on Spin Coater: GSüss stepper consists of a selection of the following steps: *Acceleration to a low spin speed if dynamic dispense is used *Resist dispense *Spin-off The wafer is first centered on the spindle chuck and held in place by vacuum. If static dispense is specified in the process, the sp..."