Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using ASE/tests CHF3+H2: Revision history

29 April 2024

• curprev 12:3712:37, 29 April 2024‎ Mfarin talk contribs‎ 16,889 bytes −972‎ →‎Etch test of Silicon Nitride

22 April 2024

• curprev 15:0115:01, 22 April 2024‎ Mfarin talk contribs‎ 17,861 bytes +2‎ →‎SiO2 test - 5 jan 2024
• curprev 15:0015:00, 22 April 2024‎ Mfarin talk contribs‎ 17,859 bytes +34‎ →‎2SiO2 test - 5 jan 2024
• curprev 14:5714:57, 22 April 2024‎ Mfarin talk contribs‎ 17,825 bytes −20‎ →‎Etch test of Silicon Nitride
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• curprev 14:4814:48, 22 April 2024‎ Mfarin talk contribs‎ 17,551 bytes 0‎ →‎25 jan 2024 - SiO2 test
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• curprev 14:2114:21, 22 April 2024‎ Mfarin talk contribs‎ 17,307 bytes +2‎ →‎25 jan 2024 - SiO2 test
• curprev 14:1414:14, 22 April 2024‎ Mfarin talk contribs‎ 17,305 bytes +2‎ →‎25 jan 2024 - SiO2 test Tag: Manual revert
• curprev 14:1314:13, 22 April 2024‎ Mfarin talk contribs‎ 17,303 bytes −2‎ →‎25 jan 2024 - SiO2 test
• curprev 14:1314:13, 22 April 2024‎ Mfarin talk contribs‎ 17,305 bytes −5‎ →‎25 jan 2024 - SiO2 test
• curprev 14:1214:12, 22 April 2024‎ Mfarin talk contribs‎ 17,310 bytes −6‎ →‎25 jan 2024 - SiO2 test Tag: Manual revert
• curprev 14:1114:11, 22 April 2024‎ Mfarin talk contribs‎ 17,316 bytes +6‎ →‎25 jan 2024 - SiO2 test
• curprev 14:1114:11, 22 April 2024‎ Mfarin talk contribs‎ 17,310 bytes +2,891‎ Undo revision 49747 by Mfarin (talk) Tag: Undo
• curprev 14:0914:09, 22 April 2024‎ Mfarin talk contribs‎ 14,419 bytes −2,891‎ No edit summary Tag: Manual revert
• curprev 14:0914:09, 22 April 2024‎ Mfarin talk contribs‎ 17,310 bytes +2,891‎ No edit summary

15 April 2024

• curprev 14:2614:26, 15 April 2024‎ Mfarin talk contribs‎ 14,419 bytes +23‎ →‎Etch test of Silicon Nitride
• curprev 14:2014:20, 15 April 2024‎ Mfarin talk contribs‎ 14,396 bytes −19‎ →‎TEST OF TABLES DESIGN (WORK ON GOING):

20 March 2024

• curprev 12:0112:01, 20 March 2024‎ Mfarin talk contribs‎ 14,415 bytes −13‎ →‎TEST OF TABLES DESIGN (WORK ON GOING):
• curprev 11:5911:59, 20 March 2024‎ Mfarin talk contribs‎ 14,428 bytes +3‎ →‎TEST OF TABLES DESIGN (WORK ON GOING):
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• curprev 11:5711:57, 20 March 2024‎ Mfarin talk contribs‎ 14,428 bytes 0‎ →‎TEST OF TABLES DESIGN (WORK ON GOING):

18 March 2024

• curprev 17:2117:21, 18 March 2024‎ Mfarin talk contribs‎ 14,428 bytes +418‎ →‎TEST OF TABLES DESIGN (WORK ON GOING):
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• curprev 16:2116:21, 18 March 2024‎ Mfarin talk contribs‎ 13,498 bytes −57‎ →‎TEST OF TABLES DESIGN (WORK ON GOING):
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• curprev 16:1416:14, 18 March 2024‎ Mfarin talk contribs‎ 13,608 bytes −908‎ →‎TEST OF TABLES DESIGN (WORK ON GOING):
• curprev 16:1016:10, 18 March 2024‎ Mfarin talk contribs‎ 14,516 bytes −31‎ →‎TEST OF TABLES DESIGN (WORK ON GOING):
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• curprev 16:0916:09, 18 March 2024‎ Mfarin talk contribs‎ 14,551 bytes 0‎ →‎TEST OF TABLES DESIGN (WORK ON GOING):
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• curprev 16:0416:04, 18 March 2024‎ Mfarin talk contribs‎ 14,565 bytes +87‎ →‎TEST OF TABLES DESIGN (WORK ON GOING):
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• curprev 15:3215:32, 18 March 2024‎ Mfarin talk contribs‎ 16,867 bytes +1‎ →‎TEST OF TABLES DESIGN (WORK ON GOING):
• curprev 15:3215:32, 18 March 2024‎ Mfarin talk contribs‎ 16,866 bytes −579‎ →‎TEST OF TABLES DESIGN (WORK ON GOING):
• curprev 15:2615:26, 18 March 2024‎ Mfarin talk contribs‎ 17,445 bytes −151‎ →‎TEST OF TABLES DESIGN (WORK ON GOING):
• curprev 13:3213:32, 18 March 2024‎ Mfarin talk contribs‎ 17,596 bytes −1,659‎ →‎TEST OF TABLES DESIGN (WORK ON GOING):
• curprev 13:0913:09, 18 March 2024‎ Mfarin talk contribs‎ 19,255 bytes +19‎ →‎TEST OF TABLES DESIGN (WORK ON GOING):
• curprev 13:0913:09, 18 March 2024‎ Mfarin talk contribs‎ 19,236 bytes +6‎ →‎Tests performed with DUV resist:
• curprev 13:0813:08, 18 March 2024‎ Mfarin talk contribs‎ 19,230 bytes +3‎ No edit summary
• curprev 13:0713:07, 18 March 2024‎ Mfarin talk contribs‎ 19,227 bytes −1‎ Undo revision 49539 by Mfarin (talk) Tag: Undo
• curprev 13:0413:04, 18 March 2024‎ Mfarin talk contribs‎ 19,228 bytes +1‎ →‎TEST OF TABLES DESIGN (WORK ON GOING):
• curprev 13:0413:04, 18 March 2024‎ Mfarin talk contribs‎ 19,227 bytes −4‎ →‎Tests performed with DUV resist:
• curprev 13:0113:01, 18 March 2024‎ Mfarin talk contribs‎ 19,231 bytes +8,081‎ →‎Tests performed with DUV resist:
• curprev 12:5812:58, 18 March 2024‎ Mfarin talk contribs‎ 11,150 bytes +26‎ →‎Tests performed with UV resist:
• curprev 12:5612:56, 18 March 2024‎ Mfarin talk contribs‎ 11,124 bytes +55‎ →‎Tests performed with AZ5214E resist:

5 March 2024

• curprev 16:4616:46, 5 March 2024‎ Mfarin talk contribs‎ 11,069 bytes +62‎ →‎Tests performed with 915nm UVN resist + 88nm BARC:
• curprev 16:4416:44, 5 March 2024‎ Mfarin talk contribs‎ 11,007 bytes −83‎ No edit summary
• curprev 16:4216:42, 5 March 2024‎ Mfarin talk contribs‎ 11,090 bytes +2‎ No edit summary

14 December 2023

• curprev 13:4413:44, 14 December 2023‎ Mfarin talk contribs‎ 11,088 bytes +19‎ →‎Tests performed with 915nm UVN resist + 88nm BARC:
• curprev 13:4013:40, 14 December 2023‎ Mfarin talk contribs‎ 11,069 bytes 0‎ →‎Tests performed with 915nm UVN resist + 88nm BARC:
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• curprev 13:1513:15, 14 December 2023‎ Mfarin talk contribs‎ 10,725 bytes −143‎ →‎Tests performed with 915nm UVN resist + 88nm BARC:
• curprev 13:1413:14, 14 December 2023‎ Mfarin talk contribs‎ 10,868 bytes +6‎ →‎Tests performed with 915nm UVN resist + 88nm BARC:
• curprev 13:0013:00, 14 December 2023‎ Mfarin talk contribs‎ 10,862 bytes +2‎ →‎Recipes and results - CHF3 tests
• curprev 12:5912:59, 14 December 2023‎ Mfarin talk contribs‎ 10,860 bytes +484‎ →‎Recipes and results - CHF3 tests
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• curprev 12:0912:09, 14 December 2023‎ Mfarin talk contribs‎ 10,858 bytes +1,824‎ No edit summary
• curprev 12:0812:08, 14 December 2023‎ Mfarin talk contribs‎ 9,034 bytes +86‎ →‎Recipes and results - CHF3 tests

• curprev 11:4011:40, 14 December 2023‎ Mfarin talk contribs‎ 8,948 bytes +8,948‎ Created page with "===Recipes and results - <span style="background:#FFD850">CHF₃ tests=== {| border="1" cellspacing="1" cellpadding="1" align="left" ! '''Recipe''' ! '''Recipe parameters''' ! '''Process time''' ! '''Date''' ! '''SEM picture''' ! '''SEM pic w/ no resist''' ! '''Redeposition - top view''' ! '''Profile angles''' ! '''Etch rate in SiO2''' ! '''Etch rate in resist <br> (AZ5214E inverse)''' ! '''Selectivity <br> (SiO2:resist)''' ! '''Etch rate in Si''' |- |- |-sty..."