Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using ASE/More test with CF4/H2, CHF3 and C4F8/H2 - SiO2 etch: Revision history

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curprev 11:5411:54, 29 April 2024‎ Mfarin talk contribs‎ 12,369 bytes −6‎ →‎More test with CF4/H2 - SiO2 etch
curprev 11:5311:53, 29 April 2024‎ Mfarin talk contribs‎ 12,375 bytes +1,583‎ No edit summary

curprev 14:0614:06, 22 April 2024‎ Mfarin talk contribs‎ 10,792 bytes +5‎ →‎Recent results - CF4 / H2 tests
curprev 14:0614:06, 22 April 2024‎ Mfarin talk contribs‎ 10,787 bytes +14‎ →‎Recent results - CF4 / H2 tests
curprev 14:0314:03, 22 April 2024‎ Mfarin talk contribs‎ 10,773 bytes −5‎ →‎Recipes and results - CF4 / H2 tests
curprev 14:0314:03, 22 April 2024‎ Mfarin talk contribs‎ 10,778 bytes +2,257‎ No edit summary

curprev 15:3015:30, 26 January 2024‎ Mfarin talk contribs‎ 8,521 bytes +3,166‎ No edit summary
curprev 15:2915:29, 26 January 2024‎ Mfarin talk contribs‎ 5,355 bytes −18‎ →‎More test with CF4/H2, CHF3 and C4F8/H2 - SiO2 etch

curprev 13:4813:48, 3 October 2023‎ Mfarin talk contribs‎ 51 bytes +51‎ Created page with "More test with CF4/H2, CHF3 and C4F8/H2 - SiO2 etch"

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