Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using ASE: Revision history

16 May 2018

• curprev 13:1113:11, 16 May 2018‎ Bghe talk contribs‎ 8,080 bytes −25‎ →‎SiO2 etch with resist mask, wafer with clamping and He backside cooling
• curprev 13:1013:10, 16 May 2018‎ Bghe talk contribs‎ 8,105 bytes +150‎ →‎SiO2 etch with resist mask, wafer with clamping and He backside cooling
• curprev 13:0713:07, 16 May 2018‎ Bghe talk contribs‎ 7,955 bytes +1,400‎ →‎SiO2 etch with resist mask, wafer with clamping and He backside cooling
• curprev 13:0313:03, 16 May 2018‎ Bghe talk contribs‎ 6,555 bytes +147‎ →‎Development work: SiO2 etch with resist mask, sample on carrier (Si carrier)
• curprev 12:5912:59, 16 May 2018‎ Bghe talk contribs‎ 6,408 bytes +7‎ →‎SiO2 etch with resist mask, sample on carrier (Si carrier) in the ICP mode using C4F8/H2/He chemistry
• curprev 12:5212:52, 16 May 2018‎ Bghe talk contribs‎ 6,401 bytes +3‎ →‎SiO2 etch with resist mask, sample on carrier (Si carrier) in the ICP mode using C4F8/H2 chemistry
• curprev 12:5112:51, 16 May 2018‎ Bghe talk contribs‎ 6,398 bytes 0‎ →‎Results when etching a whole wafer on an Al carrier
• curprev 12:5012:50, 16 May 2018‎ Bghe talk contribs‎ 6,398 bytes +449‎ →‎Results when etching a piece of wafer on a Si carrier
• curprev 12:4812:48, 16 May 2018‎ Bghe talk contribs‎ 5,949 bytes −3‎ →‎Results for 1SiO2_02 on a piece of wafer on a Si carrier
• curprev 12:4712:47, 16 May 2018‎ Bghe talk contribs‎ 5,952 bytes +95‎ →‎Results for 1SiO2_02 on a piece of wafer on a Si carrier
• curprev 12:4412:44, 16 May 2018‎ Bghe talk contribs‎ 5,857 bytes +40‎ →‎Results for 1SiO2_02 on a piece of wafer on a Si carrier
• curprev 12:4112:41, 16 May 2018‎ Bghe talk contribs‎ 5,817 bytes −2‎ →‎The recommended recipe for SiO2 etch using a carrier is this
• curprev 12:4112:41, 16 May 2018‎ Bghe talk contribs‎ 5,819 bytes +86‎ →‎The recommended recipe for SiO2 etch using a carrier is this

17 April 2018

• curprev 13:2513:25, 17 April 2018‎ Bghe talk contribs‎ 5,733 bytes +87‎ →‎SiO2 etch with resist mask, sample on carrier (Si carrier) in the ICP mode using C4F8/H2 chemistry
• curprev 13:2313:23, 17 April 2018‎ Bghe talk contribs‎ 5,646 bytes +111‎ →‎Effect chart made from the observations in this studie
• curprev 13:1913:19, 17 April 2018‎ Bghe talk contribs‎ 5,535 bytes +1‎ →‎Effect chart made from the observations in this studie
• curprev 13:1613:16, 17 April 2018‎ Bghe talk contribs‎ 5,534 bytes +10‎ →‎SiO2 etch with resist mask, sample on carrier (Si carrier) in the RIE mode using CF4/CHF3/H2 chemistry
• curprev 13:1513:15, 17 April 2018‎ Bghe talk contribs‎ 5,524 bytes +547‎ →‎SiO2 etch with resist mask, sample on carrier (Si carrier) in the RIE mode using CF4/CFH3/H2 chemistry
• curprev 13:0413:04, 17 April 2018‎ Bghe talk contribs‎ 4,977 bytes −107‎ →‎Effect chart made from the observations in this studie
• curprev 13:0113:01, 17 April 2018‎ Bghe talk contribs‎ 5,084 bytes +1,787‎ →‎SiO2 etch with resist mask, sample on carrier (Si carrier) in the ICP mode using C4F8/H2 chemistry

6 April 2018

• curprev 15:4815:48, 6 April 2018‎ Bghe talk contribs‎ 3,297 bytes +204‎ →‎SiO2 etch with resist mask, sample on carrier (Si carrier) in the RIE mode using CF4/CFH3/H2 chemistry
• curprev 15:4615:46, 6 April 2018‎ Bghe talk contribs‎ 3,093 bytes +159‎ →‎Development work: SiO2 etch with resist mask, sample on carrier (Si carrier)
• curprev 14:0114:01, 6 April 2018‎ Bghe talk contribs‎ 2,934 bytes +878‎ →‎Development work: SiO2 etch with resist mask, sample on carrier (Si carrier)

5 April 2018

• curprev 13:4613:46, 5 April 2018‎ Bghe talk contribs‎ 2,056 bytes +100‎ →‎Development work: SiO2 etch with resist mask, sample on carrier (Si carrier)
• curprev 13:4413:44, 5 April 2018‎ Bghe talk contribs‎ 1,956 bytes +2‎ →‎Results for 1SiO2_02 on a piece of wafer on a Si carrier
• curprev 13:4313:43, 5 April 2018‎ Bghe talk contribs‎ 1,954 bytes +462‎ →‎The recommended recipe for SiO2 etch using a carrier is this
• curprev 13:3713:37, 5 April 2018‎ Bghe talk contribs‎ 1,492 bytes +335‎ →‎The recommended recipe for SiO2 etch using a carrier is this
• curprev 13:3413:34, 5 April 2018‎ Bghe talk contribs‎ 1,157 bytes +68‎ →‎Development work: SiO2 etch with resist mask, sample on carrier (Si carrier)
• curprev 13:3013:30, 5 April 2018‎ Bghe talk contribs‎ 1,089 bytes +3‎ →‎Development work: SiO2 etch with resist mask, sample on carrier (Si carrier)
• curprev 13:2913:29, 5 April 2018‎ Bghe talk contribs‎ 1,086 bytes −6‎ →‎Development work: SiO2 etch with resist mask, sample on carrier (Si carrier)
• curprev 13:2813:28, 5 April 2018‎ Bghe talk contribs‎ 1,092 bytes +1‎ →‎Development work: SiO2 etch with resist mask, sample on carrier (Si carrier)
• curprev 13:2013:20, 5 April 2018‎ Bghe talk contribs‎ 1,091 bytes −167‎ →‎Development work: SiO2 etch with resist mask, sample on carrier (Si carrier)
• curprev 13:1513:15, 5 April 2018‎ Bghe talk contribs‎ 1,258 bytes 0‎ →‎Development work: SiO2 etch with resist mask, sample on carrier (Si carrier)
• curprev 13:1513:15, 5 April 2018‎ Bghe talk contribs‎ 1,258 bytes +230‎ →‎Development work: SiO2 etch with resist mask, sample on carrier (Si carrier)
• curprev 12:0312:03, 5 April 2018‎ Bghe talk contribs‎ 1,028 bytes −58‎ →‎Development work: SiO2 etch with resist mask, sample on carrier (Si carrier)
• curprev 12:0312:03, 5 April 2018‎ Bghe talk contribs‎ 1,086 bytes +53‎ →‎Development work: SiO2 etch with resist mask, sample on carrier (Si carrier)
• curprev 12:0112:01, 5 April 2018‎ Bghe talk contribs‎ 1,033 bytes +1‎ →‎Development work: SiO2 etch with resist mask, sample on carrier (Si carrier)
• curprev 12:0112:01, 5 April 2018‎ Bghe talk contribs‎ 1,032 bytes +1‎ →‎Development work: SiO2 etch with resist mask, sample on carrier (Si carrier)
• curprev 12:0112:01, 5 April 2018‎ Bghe talk contribs‎ 1,031 bytes +1‎ →‎Development work: SiO2 etch with resist mask, sample on carrier (Si carrier)
• curprev 12:0012:00, 5 April 2018‎ Bghe talk contribs‎ 1,030 bytes +416‎ →‎Development work: SiO2 etch with resist mask, sample on carrier (Si carrier)
• curprev 11:5611:56, 5 April 2018‎ Bghe talk contribs‎ 614 bytes −5‎ →‎Development work: SiO2 etch with resist mask, sample on carrier (Si carrier)
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• curprev 11:1911:19, 5 April 2018‎ Bghe talk contribs‎ 560 bytes +153‎ No edit summary

24 January 2018

• curprev 09:5809:58, 24 January 2018‎ Bghe talk contribs‎ 407 bytes 0‎ →‎THIS PAGE IS UNDER CONSTRUCTION200px
• curprev 09:5809:58, 24 January 2018‎ Bghe talk contribs‎ 407 bytes +57‎ No edit summary

• curprev 09:5309:53, 24 January 2018‎ Bghe talk contribs‎ 350 bytes +350‎ Created page with "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etc..."