Specific Process Knowledge/Characterization/Stress measurement: Revision history

9 February 2024

• curprev 11:2711:27, 9 February 2024‎ Reet talk contribs‎ 7,146 bytes +6‎ →‎Types of stress and their origin

22 January 2024

• curprev 13:1813:18, 22 January 2024‎ Reet talk contribs‎ 7,140 bytes −4‎ →‎When a thin film is deposited on both sides of the wafer
• curprev 13:1713:17, 22 January 2024‎ Reet talk contribs‎ 7,144 bytes +71‎ →‎Types of stress and their origin

12 January 2024

• curprev 15:5115:51, 12 January 2024‎ Reet talk contribs‎ 7,073 bytes +108‎ →‎Types of stress

10 May 2023

• curprev 14:1014:10, 10 May 2023‎ Reet talk contribs‎ 6,965 bytes +79‎ No edit summary

16 September 2022

• curprev 14:0914:09, 16 September 2022‎ Reet talk contribs‎ m 6,886 bytes +35‎ →‎Types of stress
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9 September 2022

• curprev 17:3817:38, 9 September 2022‎ Reet talk contribs‎ 6,851 bytes +260‎ →‎Stress measurement: added another link
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• curprev 17:2617:26, 9 September 2022‎ Reet talk contribs‎ m 6,534 bytes +17‎ →‎Types of stress
• curprev 17:2617:26, 9 September 2022‎ Reet talk contribs‎ 6,517 bytes +154‎ →‎Types of stress: added another link

8 September 2022

• curprev 15:0015:00, 8 September 2022‎ Reet talk contribs‎ 6,363 bytes +499‎ →‎Types of stress
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5 September 2022

• curprev 14:3914:39, 5 September 2022‎ Reet talk contribs‎ 5,979 bytes +115‎ →‎Types of stress
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7 January 2022

• curprev 12:5312:53, 7 January 2022‎ Reet talk contribs‎ 5,316 bytes −1‎ →‎When a thin film is deposited on both sides of the wafer
• curprev 12:5212:52, 7 January 2022‎ Reet talk contribs‎ m 5,317 bytes +115‎ →‎When a thin film is deposited on one side of the wafer
• curprev 12:5112:51, 7 January 2022‎ Reet talk contribs‎ m 5,202 bytes +128‎ →‎When a thin film is deposited on both sides of the wafer
• curprev 12:5012:50, 7 January 2022‎ Reet talk contribs‎ m 5,074 bytes +17‎ →‎When a thin film is deposited on one side of the wafer
• curprev 12:4912:49, 7 January 2022‎ Reet talk contribs‎ m 5,057 bytes +13‎ →‎When a thin film is deposited on one side of the wafer
• curprev 12:4712:47, 7 January 2022‎ Reet talk contribs‎ m 5,044 bytes +22‎ →‎Stress measurement

17 April 2020

• curprev 15:2415:24, 17 April 2020‎ Reet talk contribs‎ m 5,022 bytes +190‎ →‎Stress measurement using XRD: addition of link to SLSII software help document
• curprev 15:1515:15, 17 April 2020‎ Reet talk contribs‎ m 4,832 bytes −58‎ →‎Stress measurement: language and spelling corrections
• curprev 10:4210:42, 17 April 2020‎ Reet talk contribs‎ m 4,890 bytes +192‎ →‎Stress measurement using XRD: corrected links and added a bit more info
• curprev 10:3110:31, 17 April 2020‎ Reet talk contribs‎ 4,698 bytes +1,598‎ added section on stress measurement using the XRD - very preliminary

1 April 2019

• curprev 09:4209:42, 1 April 2019‎ Pevo talk contribs‎ 3,100 bytes 0‎ No edit summary
• curprev 09:3809:38, 1 April 2019‎ Pevo talk contribs‎ 3,100 bytes −14‎ →‎When the deposition is on both sides of the wafer
• curprev 09:3509:35, 1 April 2019‎ Pevo talk contribs‎ 3,114 bytes −40‎ →‎When the deposition is on one side of the wafer
• curprev 09:3209:32, 1 April 2019‎ Pevo talk contribs‎ 3,154 bytes +37‎ →‎When the deposition is on one side of the wafer
• curprev 09:3009:30, 1 April 2019‎ Pevo talk contribs‎ 3,117 bytes +18‎ No edit summary

29 June 2016

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23 May 2014

• curprev 11:2511:25, 23 May 2014‎ Knil talk contribs‎ 3,104 bytes +180‎ →‎When the deposition is on both sides of the wafer
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27 January 2014

• curprev 17:0917:09, 27 January 2014‎ Knil talk contribs‎ 2,744 bytes +41‎ →‎When the deposition is on both sides of the wafer
• curprev 17:0817:08, 27 January 2014‎ Knil talk contribs‎ 2,703 bytes +41‎ →‎When the deposition is on one side of the wafer

21 August 2013

• curprev 11:1911:19, 21 August 2013‎ Bghe talk contribs‎ 2,662 bytes +226‎ No edit summary

8 October 2012

• curprev 13:5513:55, 8 October 2012‎ Kn talk contribs‎ 2,436 bytes +344‎ No edit summary
• curprev 13:4813:48, 8 October 2012‎ Kn talk contribs‎ 2,092 bytes +8‎ →‎When the deposition is on both sides of the wafer
• curprev 13:4713:47, 8 October 2012‎ Kn talk contribs‎ 2,084 bytes +8‎ →‎When the deposition is on one side of the wafer

31 January 2008

• curprev 15:2015:20, 31 January 2008‎ BGE talk contribs‎ 2,076 bytes +7‎ →‎When deposition on both sides of the wafer
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• curprev 15:1915:19, 31 January 2008‎ BGE talk contribs‎ 2,062 bytes −10‎ No edit summary
• curprev 15:1915:19, 31 January 2008‎ BGE talk contribs‎ 2,072 bytes +6‎ No edit summary

5 November 2007

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• curprev 15:2015:20, 5 November 2007‎ BGE talk contribs‎ 1,095 bytes +39‎ No edit summary
• curprev 15:1815:18, 5 November 2007‎ BGE talk contribs‎ 1,056 bytes +70‎ No edit summary

1 November 2007

• curprev 16:2416:24, 1 November 2007‎ BGE talk contribs‎ 986 bytes +986‎ New page: Stress measurements of a thin film can be done measuring the wafer bow before and after deposition of the film. If the film is deposited on both sides of the wafer you can measure the bow ...