Specific Process Knowledge/Characterization/Profiler: Revision history

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curprev 16:3616:36, 5 February 2024‎ Bghe talk contribs‎ 22,057 bytes +183‎ →‎Optical Profiler (Sensofar S Neox)

curprev 15:2615:26, 18 July 2023‎ Bghe talk contribs‎ 21,513 bytes 0‎ →‎Optical Profiler (Sensofar S Neox)

curprev 14:1414:14, 24 May 2023‎ Reet talk contribs‎ 21,139 bytes +62‎ →‎Process information
curprev 14:0714:07, 24 May 2023‎ Reet talk contribs‎ 21,077 bytes −38‎ →‎Process information
curprev 14:0514:05, 24 May 2023‎ Reet talk contribs‎ 21,115 bytes +9‎ →‎Process information
curprev 12:0512:05, 24 May 2023‎ Reet talk contribs‎ 21,106 bytes +13‎ →‎Process information

curprev 14:0314:03, 16 March 2023‎ Reet talk contribs‎ 21,093 bytes −35‎ →‎Stylus Profiler: Dektak150

curprev 17:2417:24, 20 January 2023‎ Bghe talk contribs‎ 21,139 bytes +21‎ →‎Equipment performance and process related parameters
curprev 17:2317:23, 20 January 2023‎ Bghe talk contribs‎ 21,118 bytes +33‎ →‎Process Information
curprev 17:1617:16, 20 January 2023‎ Bghe talk contribs‎ 21,085 bytes −12‎ →‎Optical Profiler (Sensofar S Neox)

curprev 12:4612:46, 9 January 2023‎ Bghe talk contribs‎ 21,097 bytes −2‎ →‎Optical Profiler (Sensofar S Neox)
curprev 12:4512:45, 9 January 2023‎ Bghe talk contribs‎ 21,099 bytes +87‎ →‎Optical Profiler (Sensofar S Neox)

curprev 11:4211:42, 10 November 2022‎ Bghe talk contribs‎ 20,719 bytes 0‎ →‎Optical Profiler (Sensofar S Neox)

curprev 14:4014:40, 8 September 2022‎ Reet talk contribs‎ m 20,719 bytes −4‎ →‎Process information

curprev 12:0812:08, 20 May 2022‎ Reet talk contribs‎ 24,788 bytes −69‎ →‎Stylus Profiler (Tencor P17): added Acceptance test results
curprev 10:5510:55, 20 May 2022‎ Reet talk contribs‎ 24,857 bytes −17‎ →‎Height measurement accuracy for the DektakXT
curprev 10:5510:55, 20 May 2022‎ Reet talk contribs‎ 24,874 bytes −11‎ →‎Equipment performance and process related parameters Dektak XTA
curprev 10:5410:54, 20 May 2022‎ Reet talk contribs‎ m 24,885 bytes −186‎ →‎Stylus Profiler (Tencor P17)

curprev 13:0313:03, 7 January 2022‎ Reet talk contribs‎ 25,071 bytes +41‎ →‎Equipment performance and process related parameters Stylus Profiler (Tencor P17)
curprev 13:0013:00, 7 January 2022‎ Reet talk contribs‎ m 25,030 bytes +50‎ →‎Influence of calibration standard uncertainty

curprev 14:2614:26, 29 November 2021‎ Reet talk contribs‎ m 24,949 bytes +2‎ →‎Total uncertainty
curprev 14:2614:26, 29 November 2021‎ Reet talk contribs‎ 24,947 bytes +426‎ →‎Total uncertainty

curprev 13:0913:09, 25 November 2021‎ Reet talk contribs‎ 24,521 bytes +77‎ →‎Equipment performance and process related parameters Stylus Profiler (Tencor P17)
curprev 12:2512:25, 25 November 2021‎ Reet talk contribs‎ m 24,444 bytes +49‎ →‎Equipment performance and process related parameters Stylus Profiler (Tencor P17)
curprev 12:1512:15, 25 November 2021‎ Reet talk contribs‎ m 24,395 bytes 0‎ →‎Equipment performance and process related parameters Stylus Profiler (Tencor P17)
curprev 12:1412:14, 25 November 2021‎ Reet talk contribs‎ m 24,395 bytes +1‎ →‎Equipment performance and process related parameters Stylus Profiler (Tencor P17)

curprev 16:2116:21, 3 November 2021‎ Reet talk contribs‎ m 23,449 bytes +639‎ →‎Stylus Profiler (Tencor P17) 70px

curprev 16:2716:27, 16 August 2021‎ Bghe talk contribs‎ 22,810 bytes 0‎ →‎Optical Profiler (Sensofar S Neox)

curprev 11:2511:25, 7 May 2021‎ Reet talk contribs‎ m 22,810 bytes 0‎ →‎Stylus Profiler (Tencor P17) 70px
curprev 11:2311:23, 7 May 2021‎ Reet talk contribs‎ 22,810 bytes +245‎ →‎Stylus Profiler (Tencor P17) 70px

curprev 00:0800:08, 7 February 2021‎ Reet talk contribs‎ 22,011 bytes +3,411‎ Added section on P17 profiler

curprev 15:5215:52, 5 February 2021‎ Reet talk contribs‎ 18,600 bytes −7‎ →‎Overview of the Nanolab profilers

curprev 09:3609:36, 6 October 2020‎ Reet talk contribs‎ m 18,607 bytes +20‎ →‎Total uncertainty: figure update
curprev 09:1009:10, 6 October 2020‎ Reet talk contribs‎ 18,587 bytes −3,601‎ →‎Dektak 8 stylus profiler: removed section as equipment is out of the cleanroom

curprev 23:4923:49, 18 June 2020‎ Reet talk contribs‎ m 21,082 bytes +61‎ →‎Equipment performance and process related parameters Dektak XTA
curprev 23:4823:48, 18 June 2020‎ Reet talk contribs‎ m 21,021 bytes +29‎ →‎Equipment performance and process related parameters Dektak XTA
curprev 23:4623:46, 18 June 2020‎ Reet talk contribs‎ 20,992 bytes +1,290‎ →‎Height accuracy: updated with more info
curprev 17:0517:05, 18 June 2020‎ Reet talk contribs‎ m 19,702 bytes +49‎ →‎Height accuracy

curprev 08:5608:56, 12 June 2020‎ Bghe talk contribs‎ 19,653 bytes +9‎ →‎Optical Profiler (Sensofar)
curprev 08:5508:55, 12 June 2020‎ Bghe talk contribs‎ 19,644 bytes +142‎ →‎Optical Profiler (Sensofar)

curprev 13:2013:20, 3 June 2020‎ Reet talk contribs‎ 19,378 bytes +197‎ →‎Quality control of measurement accuracy: edited info on calibration
curprev 13:1913:19, 3 June 2020‎ Reet talk contribs‎ 19,181 bytes +171‎ →‎Quality control of measurement accuracy: edited info on calibration
curprev 13:1313:13, 3 June 2020‎ Reet talk contribs‎ m 19,010 bytes +116‎ →‎Quality control of measurement accuracy: confidence interval added for step height
curprev 13:1213:12, 3 June 2020‎ Reet talk contribs‎ m 18,894 bytes +116‎ →‎Quality control of measurement accuracy: added info on confidence interval

curprev 11:2111:21, 19 May 2020‎ Reet talk contribs‎ m 18,778 bytes −1‎ →‎Quality control of measurement accuracy
curprev 11:2111:21, 19 May 2020‎ Reet talk contribs‎ 18,779 bytes +928‎ →‎Dektak 8 stylus profiler: added QC section
curprev 11:1011:10, 19 May 2020‎ Reet talk contribs‎ 17,851 bytes +2‎ →‎Quality control of measurement accuracy
curprev 11:0911:09, 19 May 2020‎ Reet talk contribs‎ 17,849 bytes +929‎ →‎Equipment performance and process related parameters Dektak XTA

curprev 11:3311:33, 14 May 2020‎ Bghe talk contribs‎ 16,920 bytes +12‎ →‎Process Information
curprev 11:3111:31, 14 May 2020‎ Bghe talk contribs‎ 16,908 bytes +2‎ →‎Process Information
curprev 11:3011:30, 14 May 2020‎ Bghe talk contribs‎ 16,906 bytes +131‎ →‎Process Information

curprev 09:0509:05, 20 April 2020‎ Taran talk contribs‎ 16,775 bytes +2‎ →‎Optical Profiler (Filmetrics)

curprev 21:3421:34, 15 April 2020‎ Reet talk contribs‎ m 16,773 bytes +71‎ →‎Overview of the Nanolab profilers: corrected link
curprev 17:3817:38, 15 April 2020‎ Reet talk contribs‎ m 16,702 bytes +105‎ small information additions
curprev 17:3517:35, 15 April 2020‎ Reet talk contribs‎ 16,597 bytes −190‎ Moved section with link to comparison table to the top
curprev 11:5111:51, 15 April 2020‎ Reet talk contribs‎ m 16,787 bytes +1‎ →‎Stylus Profiler: Dektak150: spelling mistake

curprev 11:3411:34, 21 February 2020‎ Bghe talk contribs‎ 16,786 bytes −47‎ →‎Optical Profiler (Filmetrics) 70px

curprev 14:1414:14, 23 August 2019‎ Pevo talk contribs‎ 11,844 bytes +1‎ →‎Dektak 3ST
curprev 14:1414:14, 23 August 2019‎ Pevo talk contribs‎ 11,843 bytes 0‎ →‎Dektak 3ST

curprev 15:1715:17, 1 May 2019‎ Paphol talk contribs‎ 11,843 bytes −151‎ →‎Dektak III-V Profiler

curprev 14:4114:41, 16 March 2015‎ Bghe talk contribs‎ 11,832 bytes +29‎ →‎Process Information

curprev 12:3212:32, 18 September 2014‎ Knil talk contribs‎ 11,803 bytes +1,977‎ No edit summary

curprev 15:1315:13, 25 August 2014‎ Bghe talk contribs‎ 9,826 bytes +17‎ No edit summary

curprev 10:4510:45, 20 June 2014‎ Knil talk contribs‎ 9,809 bytes −21‎ →‎Dektak 8 stylus profiler

curprev 15:0615:06, 17 June 2014‎ Knil talk contribs‎ 9,830 bytes −24‎ →‎Equipment performance and process related parameters Dektak XTA_new
curprev 15:0515:05, 17 June 2014‎ Knil talk contribs‎ 9,854 bytes 0‎ →‎Equipment performance and process related parameters Dektak XTA_new

curprev 12:4212:42, 9 April 2014‎ Bghe talk contribs‎ 9,854 bytes +1‎ No edit summary
curprev 12:4112:41, 9 April 2014‎ Bghe talk contribs‎ 9,853 bytes +73‎ No edit summary

curprev 11:4411:44, 28 February 2014‎ Bghe talk contribs‎ 9,780 bytes −47‎ →‎Optical Profiler (Sensofar)

curprev 11:4611:46, 28 January 2014‎ Knil talk contribs‎ 9,827 bytes +134‎ →‎Dektak 8 stylus profiler
curprev 11:4311:43, 28 January 2014‎ Knil talk contribs‎ 9,693 bytes +134‎ →‎Dektak XTA_new stylus profiler

curprev 17:1817:18, 27 January 2014‎ Knil talk contribs‎ 9,559 bytes +2‎ →‎Equipment performance and process related parameters Dektak XTA_new
curprev 17:1717:17, 27 January 2014‎ Knil talk contribs‎ 9,557 bytes +1‎ →‎Dektak 8 stylus profiler
curprev 17:1717:17, 27 January 2014‎ Knil talk contribs‎ 9,556 bytes −1‎ →‎Dektak 8 stylus profiler

curprev 13:3913:39, 20 January 2014‎ Knil talk contribs‎ 9,557 bytes +317‎ →‎Dektak 8 stylus profiler
curprev 13:3613:36, 20 January 2014‎ Knil talk contribs‎ 9,240 bytes +13‎ →‎A rough overview of the performance of Dektak 8 stylus profiler
curprev 13:2813:28, 20 January 2014‎ Knil talk contribs‎ 9,227 bytes +14‎ →‎A rough overview of the performance of Dektak XTA_new
curprev 10:0210:02, 20 January 2014‎ Knil talk contribs‎ 9,213 bytes −3‎ →‎Dektak XTA_new stylus profiler

curprev 11:0111:01, 14 January 2014‎ Bghe talk contribs‎ 8,900 bytes −14‎ →‎Optical Profiler (Sensofar)
curprev 10:5710:57, 14 January 2014‎ Bghe talk contribs‎ 8,914 bytes +4‎ →‎A rough overview of the performance of the Optical Profiler (Sensofar)

curprev 11:1811:18, 13 January 2014‎ Pevo talk contribs‎ 8,358 bytes +1‎ →‎Optical Profiler (Sensofar)

(newest | oldest) View (newer 250 | older 250) (20 | 50 | 100 | 250 | 500)

Specific Process Knowledge/Characterization/Profiler: Revision history

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