Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using AOE/Standard recipe with resist mask/SiO2 etch with DUV mask
< Specific Process Knowledge | Etch | Etching of Silicon Oxide | SiO2 etch using AOE | Standard recipe with resist mask
Jump to navigation
Jump to search
Feedback to this page: click here
This page is written by Berit Herstrøm @ DTU Nanolab (BGHE) if nothing else is stated
- Etch of Thermal silicon oxide with DUV KRF resist as mask. Made by BGHE@Nanolab February 2015