LabAdviser/Introduction to LabAdviser and Processing

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Introduction to LabAdviser

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LabAdviser is a process handbook for equipment and laboratory facilities at the DTU Nanolab.

For the fabrication part, LabAdviser is meant to advise you to a good starting point for your cleanroom process for you to further optimization to meet your needs.

The structure of LabAdviser is designed to guide the users to find the process information they need. The idea is that the user knows what process step is needed. For example if a gold deposit is needed on a 100mm wafer. The user goes to: Main page -> Specific Process Knowledge -> Thin Film Deposition -> Gold. Then the user comes to an overview page describing how to deposit gold. From there the user decides whether to use the Wordentec or Sputter System Lesker to do it and get the available process information on the chosen equipment. This example is illustrated in the image to the right.

The image gives an idea of the page tree structure in LabAdviser and also an idea of the thoughts behind the structure. The questions to ask overall are:

• What process step do I need to apply to my sample?
  
• How can I apply this step to my sample at DTU Nanolab?
  

On the front page there is also a process guide that can help you to overview the content of process page for DTU Nanolab and guide you to the relevant page. Process Guide

For the characterization part you can find a link to CEN Overview from the front page. Her you will get an overview of the equipment at CEN and some other relevant pages.

Introduction to Micro and Nano fabrication

Take a look at the micro fabrication example "Solar cell process flow". This is an example of how to build up a process flow for a component you can make at Nanolab. Throughout the example you can find links to relevant pages in LabAdviser where information about the different processes are given.