LabAdviser

LabAdviser is a process handbook for equipment and processes at the DTU Danchip cleanroom facilities. The function and capacity of each piece of equipment is described in detail and general process steps, eg photolithography procedures, are clarified. LabAdviser is meant to advise you to a good starting point for your cleanroom process for further optimization to meet your needs. To enter LabAdviser you need to log in with your DTU login. LabAdviser is only editable for Danchip employees. If you need further information about certain machinery or processes, please contact the Danchip personnel. Any feedback you might have on LabAdviser is welcome and can be given by mail to the LabAdviser mailbox: labadviser@danchip.dtu.dk

News in LabAdviser:
The latest monthly LabAdviser update: LabAdviser update send out 2014-09-05
Slides from the customer meeting December 2013: Customer meeting 2013

Contents

• Danchip contact information
• Introduction to LabAdviser and Processing
• Process flow approval
• Specific Process Knowledge
  • Back-end processing
  • Characterization
  • Etch
  • Imprinting
  • Lithography
  • Thermal process
  • Thin film deposition
  • Wafer and sample drying
  • Wafer Bonding
  • Wafer cleaning
  • Wafer/Substrate Information
  • III-V Processes
• Equipment List
• New equipment in the pipeline and old equipment for decommissioning
• Surveys, statistics, monthly LabAdviser updates and other info.
• How to add information to LabAdviser

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Danchip Contact Info

In order to get the quickest response to training requests, process approvals, questions etc. please use the following mailboxes to DTU Nanolab (formerly known as Danchip).

Subject	Email	Description
Training and Process Flow	training@nanolab.dtu.dk	All requests regarding equipment training and process flows. Please add your Name to the subject line. Note: Requests are commonly answered within 2 workdays.
E-beam training	e-beam@nanolab.dtu.dk	Requests regarding training on JEOL JBX-9500FSZ or Raith Eline e-beam systems. Please study the material on the EBL Labadviser pages beforehand.
E-beam Cassette loading	e-beamload@nanolab.dtu.dk	Requests regarding cassette loading on JEOL JBX-9500FSZ.
General inquiries	nanolabsupport@nanolab.dtu.dk	Inquiries related to machines, cleanroom access, Mask review, tool changes, and others. Please add your Name to the subject line. Note: Requests are commonly answered within 2 workdays.
Metal Wishes	metal@nanolab.dtu.dk	Requests for change of metal in Thin Film Deposition equipment. See current and future materials in statuslog of the respective machines. Lesker - status log E-Beam Evaporator (Temescal) - status log E-Beam Evaporator (10-pockets) - status log Sputter-System Metal-Oxide(PC1) - status log Sputter-System Metal-Nitride(PC3) - logbook For requests regarding Wordentec, please contact the Thin Film group directly.
Gas-related Requests	DCH-Gas@nanolab.dtu.dk	All topics gas-related (issues, information regarding ordering, delivery, changing etc). Mostly for internal DTU Nanolab use.
LabAdviser Mailbox	labadviser@nanolab.dtu.dk	Any questions or feedback to LabAdviser.
Commercial Inquiries	sales@nanolab.dtu.dk	For all inquiries regarding in-sourcing, commercial applications, rent of cleanroom space, etc

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Cleanroom naming and phone numbers

Room number Where in the room Phone number A-1 At III-V RIE 55 804 Ax2 At the Lesker 55 815 A-5 In the corner near the furnace/plasma asher 55 803 B-1 In the corridor 55 806 C-1 At the corridor 55 808 D-1 The entrance room 55 703 D-3 At the KOH 55 940 E-1 By the thin client 55 943 E-5 By Inclined UV-lamp 55 946 E-6 Furnace 6" 55 948 F-1 III-V growth 55 949 F-2 Opposite SEM Zeiss 55 941 F-3 DUV Stepper 55 947 SIMS/XPS room in the basement ? 55 813 Injection molder room in the basement ? 55 812