2011 Usage Top list
Tool usage registered in LabManager. For tools which are charged by booking, the amount of time is the booked time. For other tools it is the registered time.
Tool usage is part of Danchip's decision making processes for maintenance allocation as well as new acquisitions but by no means the only parameter.
Rank 2011 | Tool Name | Usage (hours) |
1 | Fumehood(KOH) | 1790 |
2 | Hotplate 1 (SU8) | 1617 |
3 | EVG NIL | 1211 |
4 | Wordentec | 1157 |
5 | Hotplate 2 (SU8) | 1130 |
6 | SEM-LEO | 945 |
7 | SEM - FEI | 924 |
8 | SEM - Zeiss | 881 |
9 | Sputter-System(Lesker) | 871 |
10 | Furnace: Bor Drive-in | 776 |
11 | Nikon ECLIPSE L200 | 766 |
12 | III-V Dielectric Evaporator | 682 |
13 | KS Aligner | 673 |
14 | E-beam Writer | 666 |
15 | NanoMan(AFM) | 636 |
16 | RIE2 | 626 |
17 | XPS-ThermoScientific | 584 |
18 | Furnace: Phosphor Drive-in | 538 |
19 | ASE | 529 |
20 | DRIE-Pegasus | 523 |
Internal Danchip sponsors not included in these totals: Process Develop, Maintenance, QC