Specific Process Knowledge/Thin film deposition/Deposition of Titanium Oxide
Deposition of Titanium Oxide
Titanium oxide can be deposited only by sputter technique. At the moment the only system where we have a target for Titanium oxide is IBE/IBSD Ionfab300. The target is Ti. During the sputter deposition oxygen is added to the chamber resulting in Titanium oxide on the sample.