Specific Process Knowledge/Etch/DRIE-Pegasus/Notation

How to read the SPTS notation on process recipes

To understand the SPTS short hand notation on process recipes look at two examples from the etch cycle of step1 of the Process A described below:

1. The Platen power has the setting 120 >> 140 (1.5s) 45 - it is to be interpreted as:
   1. In the first 1.5 seconds of the every cycle the platen power has a value that is ramped (indicated by >>) from 120 W initially to 150 W in the end
   2. During the remainder of the cycle the platen power is kept constant at 45 W.
2. The Pressure has the setting 25 (1.5 s) 90 >> 150 - it is to be interpreted as:
   1. In the first 1.5 seconds the pressure is constant at 25 mtorr.
   2. During the remainder of the cycle the pressure has i higher value that is ramped from 90 initially to 150 mtorr in the last etch cycle.