In E-beam lithography it is often necesarry to do a dose test in order to get the required result. In a dose test one will expose critical parts of a pattern with various doses and determine the best dose by SEM analysis of the final pattern. There are several ways to set up a dose test array on the JEOL system, in this section we will describe four different setups, each with their own benefits and drawbacks.

Simple SDF sequencing

The most straightforward method is to create one SDF sequence per dose and simply vary the dose with the RESIST command in the SDF.

Dose modulation in JDF

Using Chipplace in Beamer

Scripted expansion of a PEC modulation table