Specific Process Knowledge/Etch/ICP Metal Etcher

Etching of nanostructures in silicon using the ICP Metal Etcher

	Sinano3.0	Sinano3.1	Sinano3.2	Sinano3.3	Sinano3.4	Sinano4.0	Sinano3.5	Sinano3.6
Cl2	0	0	0	0	0	20	15	15
BCl3	5	3	5	5	5	0	5	5
HBr	15	17	15	15	15	0	0	0

• 1 - the first nanoetch

• Sinano3.0

• Sinano3.1

• Sinano3.2

• Sinano3.3

• Sinano3.4

• Sinano3.5

• Sinano3.6

• Sinano4.0