Template:Maximus: AZ5214E

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Revision as of 14:38, 1 November 2007 by Elk (talk | contribs) (New page: Maximus can be used for spinning on 2", 4" and 6" substrates. Right now we only have few recipes for the standard thicknesses, but we are working at it. Please address you suggestions to P...)
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Maximus can be used for spinning on 2", 4" and 6" substrates. Right now we only have few recipes for the standard thicknesses, but we are working at it. Please address you suggestions to Photolith Team in case you have some special needs.

  • for 4" substrates 1,5 um resist use recipe:????
  • for 6" substrates 1,5 um resist use recipe:???
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