Specific Process Knowledge/Thin film deposition/Deposition of Germanium/Thermal Ge deposition Wordentec
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All contents on this page by DTU Nanolab staff.
Recipe
Use Wordentec recipe 27 for the thermal Ge deposition.
Recipe settings
This excel files containes some notes regarding thermal Ge evaporation: Test thermal deposition of Ge in Wordentec
Test was perfomed February 2013, KNIL.