Template:Spinning Track1
Track1 can be used to spin the standard thicknesses. You can use the recipes in the list below:
- PR1_5 for 1,5 um resist thickness
- PR2_2 for 2,2 um resist thickness
- PR4_2 for 4,2 um resist thickness
If you want to see parameters for those spins please refer to this document: Parameters from Track1