Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/Slow etch

From LabAdviser

< Specific Process Knowledge‎ | Etch‎ | DRIE-Pegasus‎ | Pegasus-4

Revision as of 15:28, 6 December 2022 by Bghe (talk | contribs) (Created page with "=The slow etch= The slow etch is designed to etch slow at low powers to etch thin films and to avoid overheating of samples mounted on a carrier with Capton/polyimide tape")

(diff) ← Older revision | Latest revision (diff) | Newer revision → (diff)

Jump to navigation Jump to search

The slow etch

The slow etch is designed to etch slow at low powers to etch thin films and to avoid overheating of samples mounted on a carrier with Capton/polyimide tape

Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegasus-4/Slow_etch&oldid=41848"