June 2021 Survey

#	Comments:	Answers
1	When needing urgent help (on tool breakdown/ questions on performance), it is currently almost impossible to get into contact with anyone by using the phonelist. Phones are rarely answered	We are sorry that it is a problem to reach us. However, our staff has usually many practical responsibilities and meetings which means that they are away from their desk or cannot answer their mobile phone if thay have one. Outside normal office hours you cannot expect anyone to take their phone.
2	I miss more openess in the process-logs on the quality controls performed. Example given with the KOH - I know that QC is made once a month, but no where can I locate the resulting etch rates for the KOH (only as example, this is not a ""problem""-tool"	You can find the QC results under the equipment info not in the process log. Is is under the tab Documents and is called ""Quality Control Data"". You can download the newest data as a pdf file. This also gives an overview of historical data."
3	The users from the company should obey the rules in the cleanroom as well.	All users should obey our rules. In certain cases we have had to bend the rulss e.g. regarding having phones in the CR. Company users have to access data on their own network and this requires 2 factor verification - and therefor access to a mobile phone. We are working to overcome this problem. Also we will work on being better to communicate these exceptions.
4	Very helpful staff :)	Thanks :)
5	There is too much clutter on all surfaces. Napkins, empty wafer carriers, expired pens, etc. I experienced that I need to clean or replace the wafer carriers way too often due to particles that come from tables. This is not the Nanolab staff fault, but some action is needed to make sure users tidy behind themselves better.	I think this is along the same line as the other remark. If users do not tidy up or give us a word that something is broken - it makes it difficult for us to fix quickly
6	I am dissatisfied with restocking of supplies, such as chemicals and especially beakers. Beakers are broken too often and not replaced. Also, the beakers for common use are often not cleaned or left wet in the drawers. I wish there was some procedure in place that would ensure that a standard set of dedicated beakers is always available and clean."	We agree - if these things are not marked you may throw them out. If the owner can be identified you are welcome to say it to them directly or to one from Nanolab staff.
7	I think that, considering the circumstances, you guys did realy well in keeping things running. Even if some machines were down for long time, I know it was not really anything more you could have done.	Thanks!
8	A lot of facilities are only available silicon related fabrication. I hope some of them can be also open for those three and five materials.	The problem is that III-V materials act as impurities in silicon and may directly affect the functionallity of the Silicon device. Silicon is also often processed at very high temperatures (1000degC) which causes impurities to diffuse very fast. We know that silicon also affect the III-V components, but III-V materials are normally processed at much lower temperatures (<500C) so the diffusion is slower. The intrinsic background density of impurities in III-V materials are also in general much higher than for high quality silicon. Please join one of our Tech Forums and express which machines you would like to be available for III-V materials and we will se what is possible.
9	always helpful staff	Thanks :)
10	The official Nanolab coronavirus guideline is still "2 m distance at all time - also work!". Remove this or start to enforce the guideline, nobody including staff is following this (this is an issue at all times, I am aware that the guideline is different during training sessions). This is my main reason for rating "very dissatisfied" in regards to cleanroom conditions. The official coronavirus guidelines for entering/exiting the cleanroom is also not being followed by most people.	Fortunately we have passed these times now (we hope). Our guidelines should be followed by everyone but it is also the responsibility of everyone to speak up when the rules are violated. We do not want our staff to be a police-squad.
11	I need to do Piranha in fume hoods 1 & 2 for many wafers. The current equipment does not support that too well. The glass beakers do not support a 25x 6" wafer or 25x 4" wafer cleaning. For 6" wafers there is a 7x wafer holder for the large round beakers (but only one, as some of the other multiple-wafer holders do not fit). For the 4" wafers it is worse, there is only 1x wafer holders. Having some equipment for mass-piranha cleaning for 6" and 4" wafers (currently 4" is worst) would be very helpful and require less Piranha solution. Also, labSpin 2 has a tilt, which is not detrimental, but very annoying to work with. Also, for the middle microscope at the end of the ballroom, the focusing (z-axis) handles are sort of broken and very annoying to work with. Also, the microscope in E-4 has dirty lenses when using the camera in bright field mode, which makes the images pretty bad. This has gone from not a problem to problematic over the course of the spring semester.	Many thanks for the input. The appropriate groups have been notified.
12	Facilities and equipment are always in great state even though they are sometimes out of use for more than a month. Regardless of this, the cleanroom is always in good conditions to perform any process with ease.	We also find these long down times frustrating - unfortunately it depends often on external resources or supplies.
13	In order to access our files, we currently need to take our mobile into the cleanroom for 2-factor authentication. It would be immensely helpful if 2-factor authentication could be waived for computers inside the lab.	We are working on this together with AIT. There should be a solution ahead.
14	There is a display top left of the fumehood in C-1 on which I have hit my head numerous times. I have placed a rubber bottle carrier over it as a temporary safety precaution, but a more permanent solution would be appreciated.	We will see if it can be moved.
15	I am very satisfied with DTU Nanolab overall.	Thanks :)
16	Satisfied generally. Wish "PECVD 4" situation to be better	Thanks. We know that the PECVD4 can be a bottleneck and we do try to improve the situation. However, it is difficult to set the machine in service for several days if it for most purposes works OK.
17	The only reason i am not very satisfied is that many times some equipment is out of use so often, fx Pegasus. Overall satisfied.	We do our best to keep all equipment running. We now have Pegasus 3 which can do much the same as Pegasus 1. You just need to work on 150 mm wafers
18	In general the shutdowns of Nanolab have been communicated with OK notice (Not always though). The reason why I'm dissaticfied is that the dates and info provided often becomes almost irrelevant. If a period of downtime is communicated from Nanolab to start a Monday and end Wednesday, shutdowns of some tools are almost always initiated Thursday/Friday the week before (which is NOT communicated). Furthermore, the downtime of the tools are often not resolved within the downtime period, and thus it extends several days afterwards. This makes it impossible to plan work and book tools, as the information provided is no where near what is happening in reality.	You are correct. We need to work on this part of our communication. Sometimes however external circumstances are the reason for these problems. I.e. when a promissed work is not finished on time or if something is more serious affected than expected.