Template:Spinning Track1

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Track1 can be used to spin the standard thicknesses. You can use the recipes in the list below:

  • PR1_5 for 1,5 um resist thickness
  • PR2_2 for 2,2 um resist thickness
  • PR4_2_BAKE for 4,2 um resist thickness

If you want to see parameters for those spins please refer to this document: Parameters from Track1.

Other thin resist recepes on Track1. Please notice that we do not make quality control resist thickness measurements on these recipes:

  • PR1_2
  • KT1_2
  • JTC2_8
  • JTC3_3
  • JTC3_6
  • JTC4_2
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