Specific Process Knowledge/Back-end processing/LatticeAxe

The Cleaver: Lattice Axe is designed for cleaving wafers into smaller pieces. The equipment is placed in the left drawer underneath fumehood 5: Special purposes. When operated the the Cleaver: lattice axe should always be placed inside Fume hood 5.

Approved Materials:

   Si
   Quartz
   Pyrex (Borofloat 33)
   GaAs
   InP
   Sapphire