Specific Process Knowledge/Thin film deposition/Deposition of Germanium/Thermal Ge deposition Wordentec
Feedback to this page: click here
Recipe
Use Wordentec recipe 27 for the thermal Ge deposition.
Recipe settings
This excel files containes some notes regarding thermal Ge evaporation: Test thermal deposition of Ge in Wordentec
Test was perfomed February 2013, KNIL.