Specific Process Knowledge/Thin film deposition/Deposition of Silver/Deposition of Silver

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Silver can be thermally evaporated in Wordentec. The deposition rate is highly sensitive (at least for a requested deposition rate of 5 Å/s.

Settings tested

These settings were fond to give a fairly stabel deposition rate. Max power 6.8 % Soak power 1 : 4 % Soak power 2 : 6.8 % Soak time 2: 1 min (can be set to for example 2 min, if a higher stability of the deposition rate is requested). Deposition rate: (requested) 5 Å/s

Actual value of deposition rate flucturate

15 pellets (1/8" diameter x 1/8" long) were placed in the boat before the evaporation processes were started. More than 8500 Å could be deposited from that amount, without any problem with covered contacts or smilar things.

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