Specific Process Knowledge/Thin film deposition/Deposition of Gold/Roughness of Au

Uniformity of Au layers

Au

Experimental

Au was deposited directly on unprocessed Si wafers, and the deposited layers were therafter examined with AFM.

The deposition parameters were changed, and different equipment was used. Below AFM pictures of layers deposited in different ways can be seen.

Results Au word rate5 .jpg