Specific Process Knowledge/Characterization/XPS/Processing/ALDSandwich1

From LabAdviser

XPS analysis of ALD deposited layers

How to get the data used in the example below

The wiki does not allow uploading of *.zip data files so the zipped data file has been renamed to a *.xls file. Therefore, do the following:

  1. Download this File:Experiment 2.xls.
  2. Rename the Experiment_2.zip to Experiment_2.zip
  3. Extract to a folder on a local drive. Avantage will not work on network drives.
  4. Double click on the Experiment 2.VGX file and Avantage should start.

How to fit data with multiple spectra and levels

Use one processing grid to hold all spectra to be fitted.
Each processing grid has a peak table that holds all the peaks for each level. Making depth profiles cannot be made across processing grids. Survey spectra must be kept in separate grids - if not the peak table of the survey spectrum will get mixed with the high resolution spectra.
Do not mix snapshot and scanned spectra in processing grid
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