Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using ASE

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Development work: SiO2 etch with resist mask, sample on carrier (Si carrier), see here Media:ASE SiO2 etch on carrier ICP C4F8 H2 no He rev01.pdf

Please ask Berit Herstrøm for help with SiO2 etching.

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