Specific Process Knowledge/Characterization/Probe station

From LabAdviser

Probe station

Probe station. Positioned in serviceroom CX1

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The Probe station is a - EPS150Triax - Cascade. The purpose is to measure I/V measurement, ohmic measurements etc, it has 4 individually adjustable triax connected probes, but can be fitted with additional coax connected.

It has several source meters, multi meters and a computer attached.

Equipment performance and process related parameters

Purpose

Thickness measurer

  • Wafer thickness
  • Depths of larger grooves
  • Heigth of larger mesas

Performance

Thickness resolution

  • < 5 µm

Substrates

Batch size

  • One sample
Substrate materials allowed
  • No restrictions



The user manual, technical information and contact information can be found in LabManager:

Probe station

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