Specific Process Knowledge/Characterization/Probe station

From LabAdviser
Revision as of 12:23, 21 June 2017 by Rkch (talk | contribs) (Created page with "==Probe Station== '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Pr...")
(diff) ← Older revision | Latest revision (diff) | Newer revision → (diff)

Probe Station

Feedback to this page: Station click here


The Four-Point Probe is a Veeco FPP-5000 for I/V measurement. The main purpose is to measure resistance and resistivity on a 4" silicon wafer. But can also be used to find thickness of thin layers or test if is a N- or P-type wafer.

The wafer are pushed down on the four pins so a measurement is performed. It works only for 4" wafers because a special holder is need.

Four point probe: positioned in cleanroom D-3

The user manual, technical information and contact information can be found in LabManager:

Four point probe