Specific Process Knowledge/Thermal Process/Dope with Boron

Dope with boron

The furnace A2 boron predep can be used to predeposit silicon wafers with boron. The silicon wafers are positioned in a silicon carbide boat just next to wafers of boron nitride. Boron is predeposited on the silicon wafers. -Rune, hvad er det der sker?

The concentration of boron in the wafer depends on the process temperature. The depth profile depends of the process time.

• Boron profiles from SIMS
• 
  1 hour
• 
  6 hours
• 
  16 hours

<gallery caption="Boron profiles from SIMS " widths="200px" heights="200px" perrow="3"> image:borDiffusionDepthtable.jpg image:borDiffusionDepthplot.jpg