Specific Process Knowledge/Characterization/SIMS: Secondary Ion Mass Spectrometry

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Atomika SIMS

We have decommissioned the SIMS we had at Danchip. We can guide you to another site for SIMS analysis. Information will come later.

The Atomika SIMS analyses the composition of a sample by secondary ion mass spectroscopy. By using either oxygen or cesium ions accelerated by a high tension the surface of the sample is sputtered off as ions. These ions are analysed in a mass spectrometer and one can determine the elemental composition as a function of depth. If compared to signals from reference materials one can quantify the atomic composition - in certain cases down to extremely low concentrations (ppm). Doping levels and impurities may be determined.