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Specific Process Knowledge/Thin film deposition/Deposition of Germanium/Thermal Ge deposition Wordentec

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< Specific Process Knowledge‎ | Thin film deposition‎ | Deposition of Germanium

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Recipe

Use Wordentec recipe 27 for the thermal Ge deposition.

Recipe settings

This excel files containes some notes regarding thermal Ge evaporation: Test thermal deposition of Ge in Wordentec

Test was perfomed February 2013, KNIL.

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