Specific Process Knowledge/Characterization/XPS/Processing/Basics
XPS data processing guide
This section shows all actions performed with Avantage (version 5.498) during an analysis of a sample.
Open data and save the processing document
- Locate the .VGX file in the experiment data tree.
- Either open the experiment by selecting 'Open Experiment' in Avantage, or double click on the .VGX file.
- It is a very good idea to save the processing document as you analyze the data (Avantage may crash some times) - to do so, select 'Save Processing Document' and you analysis will be saved as a .VGD file.
Survey spectrum and depth profile
As seen in the screendump below, the experiment consists of a survey spectrum and a series of high resolution spectra