May 2015 Survey
Survey introduction
The May 2015 survey was the 12th survey carried out using a format where individual cleanroom users were asked about their view on various parts of using DTU Danchip's facilities and in particular the cleanroom facilities.
The questionnaire was send to 379 registered users (based on the logging of cleanroom use) unfortunately 11 of the e-mail adresses was obsolete and thus the mails bounced, which brought the total number of potential answers to 368 . In total 58 persons answered the questionnaire which means an answer fraction of 15%.
This page deals with the comments given as part of the questionnaire. Danchip values this feedback highly.
Comments
The comments appear here as they were written in the feedback field of the questionnaire. In a few cases they have been anonymized or the worst spelling mistakes corrected.
Comment 1: I only use XPS facilities; there has been alot of unfortunate down time the last few weeks but normally its works well and is generally not over booked
Action:
This is correct, we had problems with timely manufacturer support, it should work now.
Action:
Comment 3: Danchip staff do their utmost to ensure machine availability, but it can still be frustrating for users to have a machine down for extended periods.
Action:
This is mostly due to the limited availability and long delivery time of spare parts. We are indeed not very happy about the extended downtimes but given the complexity of the equipment there is little we can do about it.
Comment 4: The helpfulness of the staff is great. However, we are often waiting long for answers to training requests. I am not happy that the IBSD is not available for TiO2 deposition most of the time. The e-beam is heavily booked and the waiting time is 3 weeks nowadays. This has been much better in the past. It is not very convenient that I loose authorization on machines which I do not use very often but that are easy to use, e.g. Wordentec and RIE2. It becomes complicated to plan my work if I need to find one of you to join me.
Action:
Comment 5: Staff Helpfulness should have a "very satisfied" as they are very helpful if they are around. However, it would be nice if there were a service provided, where staff were guaranteed the first 10-15 minutes of your session in order to help you with things like mounting the right detector and minimise background noise. I normally do not use the instrument very often the small things are sometimes forgotten a little bit :)
Action:
Unfortunately we do not have sufficient resources for that proposal. Maybe one of your colleagues who uses the SEM more often can help you.
Comment 6: There is a lot of chemical stains everywhere giving the clean room a dirty look. maybe make sure to tell people to clean after themselves?
Action:
This is correct, but the cleanroom is in use for more than 20 years now. We are in the process of exchanging most of the fume hoods/wet benches.
Comment 7: As a new cleanroom user getting hang on how much in advance the processes have to be planned to have the right metals and laser etc. So maybe that could be something that could be brought up more from supervisors of students and also from the Danchip side. Over all you are doing good job! The staff is just awesome :) Big thanks to Conny and Martin!
Action:
Good point, get a Danchip staff member as co-supervisor and you are fine.
Comment 8: It would be nice with some information on LabAdvisor regarding how to get Danchip personal to make wafers for you. I'm thinking about which email address to write, perhaps a time estimate for delivery, and something about the rate you charge. I recently thought about using this service, but could not find any information about it, so I just got training in the machines needed, even though I'm probably not going to need the machines again soon.
Action:
Make an appointment with Anders Jørgensen and bring your case before him.
Comment 9: A bit faster replay on training request.
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Comment 10: I think Danchip's initiative to change payment rules can help to make equipment that is heavily booked more available.
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Comment 11: E-beam writer: the loadteam are not always there for loading at the loading time. And the machine is fully booked because of the very limited cassette loading possibility. It will make the machine operated more efficiently if Danchip allow some heavy users to load the cassette by themselves.
Action:
Comment 12: AOE --> :( SEM leo and Supra are hard to book.
Action:
It took a long time, because of many different malfunctions and long lead times of spare parts but it is FIXED now and will never break down again :-)
Comment 13: When introductions to machines are given, sometimes there are important information missing, such as parts of the machine that can be taken in/out and that would need to be checked to assure process stability.
Action:
It would be nice to have more specific information. This is important. Could you send a mail with your experience to the relevant tool team.
Comment 14: It is always a pleasure to work with the highly competent and helpful staff of Danchip.
Action:
Thanks !.
Comment 15: The cleanroom needs USB key for data transfer from computers without network acces!
Action: