May 2014 Survey
Survey introduction
The May 2014 survey was the 11th survey carried out using a format where individual cleanroom users were asked about their view on various parts of using DTU Danchip's facilities and in particular the cleanroom facilities.
The questionaire was send to 290 registered users (based on the logging of cleanroom use) unfortunately 10 of the e-mail adresses was obsolete and thus the mails bounced, which brought the total number of potential answers to 280 . In total 56 persons answered the questionaire which means an answer fraction of 19% regardless of whether or not the bounces should be included in the total.
This page deals with the comments given as part of the questionaire. Danchip values this feedback highly.
Comments
The comments appear here as they were written in the feedback field of the questionaire. In a few cases they have been anonymized or the worst spelling mistakes corrected.
Comment 1
I might have been unlucky but last week lesker system was an hell. Also, is becoming a bottleneck since booking is done with 2-3 weeks advance.
Action:
(FLJE)
Comment 2
It is really difficult to give meaningful satisfaction points for such overall statements. For example, I think the availability and performance of optical microscopes are absolute crap, whereas the availability and performance of Electron Microscopes are quite good. Unfortunately, I use optical microscopes more than I use electron microscopes.
Action: Some optical microscope have become outdated. We intend to acquire a couple of new ones
Comment 3
When a problem arises within the cleanroom, the chances are low to be able to get in contact with the responsible personnel by calling on the phone. When the staff are found/present, they are otherwise very helpful. Could be very helpful to know where staff are (both within and outside the cleanroom) and/or if they are at Danchip that day.
Action:
The chance of getting hold of the right person by phone is often low due to the person working on another tool or with another user. Danchip staff absence can be viewed on the board across from Anita's office.
Comment 4
I have two points to make: 1) A good photo-studio setup for taking images of wafers in the cleanroom would be highly appreciated. 2) It is not on your list, but Labmanager is from a user perspective not optimal. .
Action:
1) There is a rudimentary setup with the LED lighting sheet and camera. The diverse user requests would require a complete photo studio which is out of scope inside the cleanroom.
2) We always appreciate feedback on LabManager. If you have suggestions please contact Thøger.
Comment 5
Countinuous problems and non availability of e-beam machine. Due to the countinuous problems one loses the priority since the machine is quite booked and there is no other way to expose in the weekend if one needs to load the sample just a few hours before the exposure. Still some issues with wild booking and cancellation for SEM.
Action:
We have chosen to follow the booked times regardless of breakdowns. This is to avoid even longer delays while we figure out who should go first. If specific projects require more access after breakdown, feel free to contact us.
In urgent cases please contact Peixiong Shi.
Comment 6
Some equipment is heavily booked.The manual spinner is not completely horisontal, but I don't think that is changeable.
Action: Investigate level of the manual spinner
Some tools are indeed heavily booked, but this is inevitable for a shared facility such as Danchip.
Comment 7
Many of the machine down-times have been poorly described and especially expected ready dates have been wrong. It is not Danchip's fault if a machine fails, but, as a user, I would prefer that the expected ready dates were more reliable.
Action: We will focus on improving our communication on expected ready dates
In most cases the "expected ready" date is a best guess, and may change over time. We acknowledge that in quite a few situations the dates have not been updated when they should have.
Comment 8
Implement a function in labmanager, to minimize the amount of status mail to users in the cleanroom. Make a function available, so the user can write user status and changes (such as "I'm done with the machine early") directly in labmanager. The mail pressure and number of mail that do not concern the far amount of user, is too large! :-).
Action: Several new changes in LabManager are planned which we hope will address some of these concerns
Comment 9
It would be better if the email elert can be catologized. I mean, the reader can easily know whom the emails come from, for example, the customers or technicians. In that way, we can judge the importance and priority of the email before we find time to read them.
Action: Several new changes in LabManager are planned which we hope will address some of these concerns
Comment 10
In general there has been a period now with issues with EBL, DUV and etching tools which is what we are using the most at Danchip. Thus, we hope that this will soon be improved so we easier can coordinate our work. The instabilities also results in extra work for Danchip staff since we sometimes asks for equipment changed to 6 inch mode which when it then runs 6 inch mode we cannot use it anyway because other equipment (typically EBL and DUV) is not working correctly.
Action: Discuss approaches to allow for more slack in scheduled runs
Both EBL and DUV are sophisticated tools which can and will break down once in a while. We are trying to insure operation as well as possible through expensive service contracts and there is little more we can do about it.
Comment 11
Could the Status Change emails for machines in the clean room be changed, so you only receive mails for machines that you have training in, as the amount of Status Changes emails sometimes makes me think about it as spam.
Action: Yes it is exactly one of our planned developments for LabManager
Comment 12
The atmosphere at the CR is really nice. I love CR staff, they are very friendly. I wish I could stay here longer!.
Action:
Thanks a lot, it is heartwarming to get a comment like this.
Comment 13
It would be very nice to have a bonding tool which could perform repeatedly precise alignment (x < 1 µm).
Action:
We don't know of any off-the shelf tool which is capable of this kind of precision. If you know of one, please let us know.
Comment 14
"Performance of equipment" er overordnet set "satisfied", men ved enkelt tilfælde er det "Unsatisfied". Derfor besvarelsen.
Action:
Vi forstår godt at besvarelserne nødvendigvis må blive lidt "grovkornede" tak for uddybningen.
Comment 15
In our cleanroom, many machines have been dedicated to certain type of materials, which is a good idea for the machine maintaining. However, we are doing research and very often develop new process which may contain two or more different materials. Sometimes, such new process is almost forbidden everywhere, because each material might be limited to a certain machine and their combination turns out to no where. We've tried to negotiate with danchip and it seems that there is no good way to solve it easily. We totally understand that it is also difficult and really depends on case to case. But hopefully, danchip can improve it in some way, so users can have more flexibility to develop new process.
Action:
We acknowledge the dilemma, however we do need to operate on a case-by-case approach. There does not seem to be a simple way of introducing a new material, they always come with their own contamination and cross contamination issues.
Comment 16
The down time of the PECVD2 is a major disappointment for me. It's been over 2-3 months to get it back to normal use. Also, with normal status of the machine, I found many problems with the film thickness variation from run-to-run. Responsible person was on vacation for a week and there's nobody who could fix the machine. Despite all that, I frequently had to solve minor problems with the machine all the time e.g. communication failure, fail to pump down, sliding of the sample on the carrier etc. I'm aware that the machine is old, but having the user solve the problem all the time is also not very good. Other than that I'm fully satisfied with the service.
Action: We are in the process of acquiring a replacement for PECVD 2
PECVD 2 is a more than 20 years old tool.
Comment 17
Jeg vil foreslå at lave logbøgerne som en inkorporeret del af labmanager - jeg ved der allerede er forsøg med et sådan system på "sputter system lesker" men jeg synes ikke implementeringen er særligt god. I den nuværende form er logbøgerne sat op på en måde så de er designet til at hjælpe Danchip - ikke brugerne af maskinerne. Hvis det modsatte var tilfælde ville logbøgerne blive bedre udfyldt. Det er f.eks. meget svært at finde sine egne linjer i loggen på tværs af maskiner. jeg bruger selv en løsning udviklet af m-team her på dtu og jeg vil foreslå at finde inspiration til et logbogs system derfra.
Action: Vi vil løbende udvikle logbøgerne i LabManager
Logbøgerne i LabManager er ikke færdigimplementerede, vi modtager meget gerne yderligere feedback og forslag.