Specific Process Knowledge/Wafer and sample drying/Spin Dryers

Spin dryers

Image(s) of the equipment(s)

A tool used for drying wafers. A single cassette of wafers is placed in a stainless steel rotor. The wafers are centered just off the axis of rotation, and rotated at high RPM so that centrifugal force “locks” the wafers in place.

Some of the tools have DI water connected, and can be used for both rinsing and drying of wafers, while other tools do not and can only be used for drying. All wafers have to be washed in a wetbench cleaning station before going into the spin dryer, regardless of using the rinse function or not.

The user manual(s), quality control procedure(s) and results, user APV(s), technical information and contact information can be found in LabManager: LabManager