Specific Process Knowledge/Etch/Etching of SU-8

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Revision as of 15:20, 1 November 2013 by Khara (talk | contribs) (Created page with "SU-8 can be etched by a oxygen plasma with a small amount of SF6 to remove the antimony present from the photo initiator.")
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SU-8 can be etched by a oxygen plasma with a small amount of SF6 to remove the antimony present from the photo initiator.

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