Specific Process Knowledge/Etch/Etching of Aluminium
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Etching of Aluminium
Etching of aluminium is done wet at Danchip. We have two different solutions:
- HO:HPO 1:2 at 50 oC
- Pre-mixed etch solution: PES 77-19-04 at 20 oC
Aluminium Etch 1 | Aluminium Etch 2 | ||
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General description |
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Possible masking materials: |
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Etch rate |
~70-90 nm/min (Thermal oxide) |
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Batch size |
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Size of substrate |
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Allowed materials |
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