Specific Process Knowledge/Characterization/KLA-Tencor Surfscan 6420/Acceptance test results

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Calibration wafers

Danchip has three calibration wafers for the KLA-Tencor Surfscan. The calibration wafers are 6" silicon wafer with a number of polystyrene-latex spheres uniformily spread over the surface. Diameter of polystyrene-latex spheres:

  • 0.204 µm spheres
  • 1.112 µm spheres
  • 4.000 µm spheres


Uniformity check

Handling test

6" wafers

A cassette of wafers was run over night. In the

4" and 8" wafers
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