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• 12:17, 14 December 2023 Mfarin talk contribs uploaded File:CHF t2 nP 20min-02.png (File uploaded with MsUpload)
• 10:40, 14 December 2023 Mfarin talk contribs created page Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using ASE/tests CHF3+H2 (Created page with "===Recipes and results - <span style="background:#FFD850">CHF₃ tests=== {| border="1" cellspacing="1" cellpadding="1" align="left" ! '''Recipe''' ! '''Recipe parameters''' ! '''Process time''' ! '''Date''' ! '''SEM picture''' ! '''SEM pic w/ no resist''' ! '''Redeposition - top view''' ! '''Profile angles''' ! '''Etch rate in SiO2''' ! '''Etch rate in resist <br> (AZ5214E inverse)''' ! '''Selectivity <br> (SiO2:resist)''' ! '''Etch rate in Si''' |- |- |-sty...")
• 13:22, 3 October 2023 Mfarin talk contribs created page File:SiO2 ICP 800W-15W 4min E 04.png (File uploaded with MsUpload)
• 13:22, 3 October 2023 Mfarin talk contribs uploaded File:SiO2 ICP 800W-15W 4min E 04.png (File uploaded with MsUpload)
• 13:22, 3 October 2023 Mfarin talk contribs created page File:SiO2 ICP 800W-15W 4min C 04.png (File uploaded with MsUpload)
• 13:22, 3 October 2023 Mfarin talk contribs uploaded File:SiO2 ICP 800W-15W 4min C 04.png (File uploaded with MsUpload)
• 13:22, 3 October 2023 Mfarin talk contribs created page File:SiO2 ICP 800.15W 4min af PA 02.png (File uploaded with MsUpload)
• 13:22, 3 October 2023 Mfarin talk contribs uploaded File:SiO2 ICP 800.15W 4min af PA 02.png (File uploaded with MsUpload)
• 13:22, 3 October 2023 Mfarin talk contribs created page File:SiO2 ICP 4min af PA 02.png (File uploaded with MsUpload)
• 13:22, 3 October 2023 Mfarin talk contribs uploaded File:SiO2 ICP 4min af PA 02.png (File uploaded with MsUpload)
• 13:22, 3 October 2023 Mfarin talk contribs created page File:SiO2 ICP 4m pat C 07.png (File uploaded with MsUpload)
• 13:22, 3 October 2023 Mfarin talk contribs uploaded File:SiO2 ICP 4m pat C 07.png (File uploaded with MsUpload)
• 13:22, 3 October 2023 Mfarin talk contribs created page File:SiO2 ICP 4m pat C 04.png (File uploaded with MsUpload)
• 13:22, 3 October 2023 Mfarin talk contribs uploaded File:SiO2 ICP 4m pat C 04.png (File uploaded with MsUpload)
• 13:19, 3 October 2023 Mfarin talk contribs created page File:CHF310 O2 10min af PA top 02.png (File uploaded with MsUpload)
• 13:19, 3 October 2023 Mfarin talk contribs uploaded File:CHF310 O2 10min af PA top 02.png (File uploaded with MsUpload)
• 13:19, 3 October 2023 Mfarin talk contribs created page File:CHF310 O2 10min 04.png (File uploaded with MsUpload)
• 13:19, 3 October 2023 Mfarin talk contribs uploaded File:CHF310 O2 10min 04.png (File uploaded with MsUpload)
• 13:19, 3 October 2023 Mfarin talk contribs created page File:CHF310 O2 10min 01.png (File uploaded with MsUpload)
• 13:19, 3 October 2023 Mfarin talk contribs uploaded File:CHF310 O2 10min 01.png (File uploaded with MsUpload)
• 13:19, 3 October 2023 Mfarin talk contribs created page File:CHF310 H2 10min af PA top 01.png (File uploaded with MsUpload)
• 13:19, 3 October 2023 Mfarin talk contribs uploaded File:CHF310 H2 10min af PA top 01.png (File uploaded with MsUpload)
• 13:19, 3 October 2023 Mfarin talk contribs created page File:CHF310 H2 10min 10.png (File uploaded with MsUpload)
• 13:19, 3 October 2023 Mfarin talk contribs uploaded File:CHF310 H2 10min 10.png (File uploaded with MsUpload)
• 13:19, 3 October 2023 Mfarin talk contribs created page File:CHF310 H2 10min 08.png (File uploaded with MsUpload)
• 13:19, 3 October 2023 Mfarin talk contribs uploaded File:CHF310 H2 10min 08.png (File uploaded with MsUpload)
• 13:19, 3 October 2023 Mfarin talk contribs created page File:CHF3-22.5-H2-10min-0C-C-07.png (File uploaded with MsUpload)
• 13:19, 3 October 2023 Mfarin talk contribs uploaded File:CHF3-22.5-H2-10min-0C-C-07.png (File uploaded with MsUpload)
• 13:19, 3 October 2023 Mfarin talk contribs created page File:CHF3-22.5-H2-10min-0C-C-03.png (File uploaded with MsUpload)
• 13:19, 3 October 2023 Mfarin talk contribs uploaded File:CHF3-22.5-H2-10min-0C-C-03.png (File uploaded with MsUpload)
• 13:19, 3 October 2023 Mfarin talk contribs created page File:CHF3=22.5 H2 10min C 03.png (File uploaded with MsUpload)
• 13:19, 3 October 2023 Mfarin talk contribs uploaded File:CHF3=22.5 H2 10min C 03.png (File uploaded with MsUpload)
• 13:19, 3 October 2023 Mfarin talk contribs created page File:CHF3=22.5 H2 10min C 01.png (File uploaded with MsUpload)
• 13:19, 3 October 2023 Mfarin talk contribs uploaded File:CHF3=22.5 H2 10min C 01.png (File uploaded with MsUpload)
• 13:19, 3 October 2023 Mfarin talk contribs created page File:CHF3 t2 pat C 05.png (File uploaded with MsUpload)
• 13:19, 3 October 2023 Mfarin talk contribs uploaded File:CHF3 t2 pat C 05.png (File uploaded with MsUpload)
• 13:18, 3 October 2023 Mfarin talk contribs created page File:CHF3 t2 pat C 03.png (File uploaded with MsUpload)
• 13:18, 3 October 2023 Mfarin talk contribs uploaded File:CHF3 t2 pat C 03.png (File uploaded with MsUpload)
• 13:18, 3 October 2023 Mfarin talk contribs created page File:CHF3 t2 25min af PA 05.png (File uploaded with MsUpload)
• 13:18, 3 October 2023 Mfarin talk contribs uploaded File:CHF3 t2 25min af PA 05.png (File uploaded with MsUpload)
• 13:18, 3 October 2023 Mfarin talk contribs created page File:CHF3 t1 pat C 01.png (File uploaded with MsUpload)
• 13:18, 3 October 2023 Mfarin talk contribs uploaded File:CHF3 t1 pat C 01.png (File uploaded with MsUpload)
• 13:18, 3 October 2023 Mfarin talk contribs created page File:CHF3 t1 12min af PA 03.png (File uploaded with MsUpload)
• 13:18, 3 October 2023 Mfarin talk contribs uploaded File:CHF3 t1 12min af PA 03.png (File uploaded with MsUpload)
• 13:18, 3 October 2023 Mfarin talk contribs created page File:CHF3 3535H2 10min E 01.png (File uploaded with MsUpload)
• 13:18, 3 October 2023 Mfarin talk contribs uploaded File:CHF3 3535H2 10min E 01.png (File uploaded with MsUpload)
• 13:18, 3 October 2023 Mfarin talk contribs created page File:CHF3 3535H2 10min C 06.png (File uploaded with MsUpload)
• 13:18, 3 October 2023 Mfarin talk contribs uploaded File:CHF3 3535H2 10min C 06.png (File uploaded with MsUpload)
• 13:18, 3 October 2023 Mfarin talk contribs created page File:CHF3 35H2 10min D 05.png (File uploaded with MsUpload)
• 13:18, 3 October 2023 Mfarin talk contribs uploaded File:CHF3 35H2 10min D 05.png (File uploaded with MsUpload)