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- 12:57, 3 October 2023 Mfarin talk contribs created page File:200px-35.10 af PA bot 03.png (File uploaded with MsUpload)
- 12:57, 3 October 2023 Mfarin talk contribs uploaded File:200px-35.10 af PA bot 03.png (File uploaded with MsUpload)
- 12:57, 3 October 2023 Mfarin talk contribs created page File:200px-35.10 af ase 04.png (File uploaded with MsUpload)
- 12:57, 3 October 2023 Mfarin talk contribs uploaded File:200px-35.10 af ase 04.png (File uploaded with MsUpload)
- 12:54, 3 October 2023 Mfarin talk contribs created page File:CF4ICP 11min C 01.png (File uploaded with MsUpload)
- 12:54, 3 October 2023 Mfarin talk contribs uploaded File:CF4ICP 11min C 01.png (File uploaded with MsUpload)
- 12:54, 3 October 2023 Mfarin talk contribs created page File:800px-CF4ICP 11min C 03.png (File uploaded with MsUpload)
- 12:54, 3 October 2023 Mfarin talk contribs uploaded File:800px-CF4ICP 11min C 03.png (File uploaded with MsUpload)
- 12:54, 3 October 2023 Mfarin talk contribs created page File:800px-CF4ICP 11min af PA top 01.png (File uploaded with MsUpload)
- 12:54, 3 October 2023 Mfarin talk contribs uploaded File:800px-CF4ICP 11min af PA top 01.png (File uploaded with MsUpload)
- 12:48, 3 October 2023 Mfarin talk contribs created page Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using ASE/More test with CF4/H2, CHF3 and C4F8/H2 - SiO2 etch (Created page with "More test with CF4/H2, CHF3 and C4F8/H2 - SiO2 etch")
- 15:37, 19 July 2023 Mfarin talk contribs created page Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using ASE/Unstable recipes - SiO2 etch (Created page with "=SiO2 etch with resist mask on wafer with clamping and He backside cooling= {{CC-bghe2}}, ''May 2018'' The ASE is now the "dirty" plasma etcher at Nanolab meaning small amount of metals are allowed to be exposed by the plasma. That calls for recipes etching Silicon oxide and silicon nitride as well as silicon in this machine. Not a lot experiments have been done yet etching SiO2 on wafers that are clamped and cooled but here is the best result so fare. <span style="b...")
- 13:54, 30 May 2023 Mfarin talk contribs created page File:Low22.5-af-PA-04.png (File uploaded with MsUpload)
- 13:54, 30 May 2023 Mfarin talk contribs uploaded File:Low22.5-af-PA-04.png (File uploaded with MsUpload)
- 13:54, 30 May 2023 Mfarin talk contribs created page File:Low22.5-af-PA-08.png (File uploaded with MsUpload)
- 13:54, 30 May 2023 Mfarin talk contribs uploaded File:Low22.5-af-PA-08.png (File uploaded with MsUpload)
- 13:53, 30 May 2023 Mfarin talk contribs created page File:Low35-10-af-PA-06.png (File uploaded with MsUpload)
- 13:53, 30 May 2023 Mfarin talk contribs uploaded File:Low35-10-af-PA-06.png (File uploaded with MsUpload)
- 13:53, 30 May 2023 Mfarin talk contribs created page File:Low35-10-af-PA-12.png (File uploaded with MsUpload)
- 13:53, 30 May 2023 Mfarin talk contribs uploaded File:Low35-10-af-PA-12.png (File uploaded with MsUpload)
- 13:52, 30 May 2023 Mfarin talk contribs created page File:Low45-0-af-PA-03.png (File uploaded with MsUpload)
- 13:52, 30 May 2023 Mfarin talk contribs uploaded File:Low45-0-af-PA-03.png (File uploaded with MsUpload)
- 13:52, 30 May 2023 Mfarin talk contribs created page File:Low45-0-af-PA-08.png (File uploaded with MsUpload)
- 13:52, 30 May 2023 Mfarin talk contribs uploaded File:Low45-0-af-PA-08.png (File uploaded with MsUpload)
- 09:52, 26 May 2023 Mfarin talk contribs created page File:CF4lowCP-45.10-22.png (File uploaded with MsUpload)
- 09:52, 26 May 2023 Mfarin talk contribs uploaded File:CF4lowCP-45.10-22.png (File uploaded with MsUpload)
- 09:52, 26 May 2023 Mfarin talk contribs created page File:45.10-af-PA-center-07.png (File uploaded with MsUpload)
- 09:51, 26 May 2023 Mfarin talk contribs uploaded File:45.10-af-PA-center-07.png (File uploaded with MsUpload)
- 09:51, 26 May 2023 Mfarin talk contribs created page File:CF4ICP-35.10-39.png (File uploaded with MsUpload)
- 09:51, 26 May 2023 Mfarin talk contribs uploaded File:CF4ICP-35.10-39.png (File uploaded with MsUpload)
- 09:51, 26 May 2023 Mfarin talk contribs created page File:CF4ICP-45.0c-af-PA-bot-04 1.png (File uploaded with MsUpload)
- 09:51, 26 May 2023 Mfarin talk contribs uploaded File:CF4ICP-45.0c-af-PA-bot-04 1.png (File uploaded with MsUpload)
- 14:39, 15 May 2023 Mfarin talk contribs created page File:SiO2 ICP.2-top-02.png (File uploaded with MsUpload)
- 14:39, 15 May 2023 Mfarin talk contribs uploaded File:SiO2 ICP.2-top-02.png (File uploaded with MsUpload)
- 14:39, 15 May 2023 Mfarin talk contribs created page File:SiO2 ICP.2-top-04.png (File uploaded with MsUpload)
- 14:39, 15 May 2023 Mfarin talk contribs uploaded File:SiO2 ICP.2-top-04.png (File uploaded with MsUpload)
- 14:37, 15 May 2023 Mfarin talk contribs created page File:SiO2 ICP.2 top 04.tif (File uploaded with MsUpload)
- 14:37, 15 May 2023 Mfarin talk contribs uploaded File:SiO2 ICP.2 top 04.tif (File uploaded with MsUpload)
- 14:37, 15 May 2023 Mfarin talk contribs created page File:SiO2 ICP.2 top 02.tif (File uploaded with MsUpload)
- 14:37, 15 May 2023 Mfarin talk contribs uploaded File:SiO2 ICP.2 top 02.tif (File uploaded with MsUpload)
- 13:16, 15 May 2023 Mfarin talk contribs created page Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using ASE/ICP recipe for SiO2 (Created page with " {| border="2" cellspacing="2" cellpadding="3" |-style="background:DarkGray; color:White" !Material to be etched !Recipe: 1SiO2_02 <span style="background:#FFD700">'''*This recipe is no longer stable.'''</span> !Recipe: 1SiO2_03 !Testing other settings to increase etch rate in nitride |- |Etch rate in SiO2 |22.1 nm/min |26.8 nm/min |? |- |Etch rate in PECVD nitride |. |20.8nm/min (''kabi@nanolab 20190301'') - ~0nm/min (''ecsj@nanolab 20210729'') |? |- |Etch rate in LPCVD...")
- 11:56, 13 April 2023 Mfarin talk contribs created page File:Screenshot 2023-04-13 124930.png (File uploaded with MsUpload)
- 11:56, 13 April 2023 Mfarin talk contribs uploaded File:Screenshot 2023-04-13 124930.png (File uploaded with MsUpload)
- 11:56, 13 April 2023 Mfarin talk contribs created page File:Screenshot 2023-04-13 124903.png (File uploaded with MsUpload)
- 11:56, 13 April 2023 Mfarin talk contribs uploaded File:Screenshot 2023-04-13 124903.png (File uploaded with MsUpload)
- 11:56, 13 April 2023 Mfarin talk contribs created page File:Screenshot 2023-04-13 124815.png (File uploaded with MsUpload)
- 11:56, 13 April 2023 Mfarin talk contribs uploaded File:Screenshot 2023-04-13 124815.png (File uploaded with MsUpload)
- 11:51, 13 April 2023 Mfarin talk contribs created page File:Screenshot 2023-04-13 124743.png (File uploaded with MsUpload)
- 11:51, 13 April 2023 Mfarin talk contribs uploaded File:Screenshot 2023-04-13 124743.png (File uploaded with MsUpload)
- 10:04, 13 April 2023 Mfarin talk contribs created page Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using ASE/CF4 recipes for SiO2 (Created page with "Unless otherwise stated, all content in this section was done by Maria Farinha, DTU Nanolab, April 2023")
