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- 13:14, 8 April 2023 Thope talk contribs created page Specific Process Knowledge/Lithography/EBeamLithography/EBLsubstratePrep (Created page with "=== Resist coating === An appropriate EBL resist must naturally be applied to the substrate. DTU Nanolab supplies a number of standard resists, please consult the table below. The default positive EBL resist is AR-P 6200.09 (CSAR). CSAR installed on Spin Coater: Gamma E-beam and UV for spin coating of 2", 4" and 6" substrates. For other substrate sizes (i.e. chips) or other resists Spec...")
- 13:13, 8 April 2023 Thope talk contribs created page Specific Process Knowledge/Lithography/EBL/EBLsubstratePrep (Created page with "=== Resist coating === An appropriate EBL resist must naturally be applied to the substrate. DTU Nanolab supplies a number of standard resists, please consult the table below. The default positive EBL resist is AR-P 6200.09 (CSAR). CSAR installed on Spin Coater: Gamma E-beam and UV for spin coating of 2", 4" and 6" substrates. For other substrate sizes (i.e. chips) or other resists Spec...")
- 19:20, 28 March 2023 Thope talk contribs created page Specific Process Knowledge/Lithography/ARN7500 (Created page with "Information on AR-N 7500 to come.")
- 18:42, 25 March 2023 Thope talk contribs created page File:9500Column.png (File uploaded with MsUpload)
- 18:42, 25 March 2023 Thope talk contribs uploaded File:9500Column.png (File uploaded with MsUpload)
- 12:11, 14 March 2023 Thope talk contribs created page File:WritingTimeEstimator.xlsx (File uploaded with MsUpload)
- 12:11, 14 March 2023 Thope talk contribs uploaded File:WritingTimeEstimator.xlsx (File uploaded with MsUpload)
- 11:28, 14 March 2023 Thope talk contribs created page Specific Process Knowledge/Lithography/EBeamLithography/JEOL 9500 User Guide (Created page with "= Purpose, location and technical specifications = ==Type and location of machine== The JEOL JBX-9500FS electron beam lithography system is a spot electron beam lithography system designed for use in writing patterns (10 nm - 1 µm) in electron sensitive resists. The JEOL JBX-9500FS was purchased in 2012 and is installed in E-1 and E-2 at DTU Nanolabv. The main console of the e-beam writer is installed in E-2 which is a class 10 (ISO 4) cleanroom with tight temperature...")
- 10:46, 13 March 2023 Thope talk contribs created page File:JDF ARRAY.png (File uploaded with MsUpload)
- 10:46, 13 March 2023 Thope talk contribs uploaded File:JDF ARRAY.png (File uploaded with MsUpload)
- 09:57, 11 March 2023 Thope talk contribs created page File:BeamPitch.png (File uploaded with MsUpload)
- 09:57, 11 March 2023 Thope talk contribs uploaded File:BeamPitch.png (File uploaded with MsUpload)
- 13:06, 10 March 2023 Thope talk contribs created page File:BEAMER PEC2.png (File uploaded with MsUpload)
- 13:06, 10 March 2023 Thope talk contribs uploaded File:BEAMER PEC2.png (File uploaded with MsUpload)
- 12:29, 10 March 2023 Thope talk contribs created page Specific Process Knowledge/Lithography/EBeamLithography/TRACER (Created page with "=PSF generation with Tracer= To come")
- 09:20, 10 March 2023 Thope talk contribs created page Specific Process Knowledge/Lithography/EBeamLithography/JEOL 9500 trouble shooting (Created page with "To come")
- 13:39, 8 March 2023 Thope talk contribs created page File:9500CoordinateSystem.png (File uploaded with MsUpload)
- 13:39, 8 March 2023 Thope talk contribs uploaded File:9500CoordinateSystem.png (File uploaded with MsUpload)
- 10:17, 8 March 2023 Thope talk contribs created page File:B6025-025.png (File uploaded with MsUpload)
- 10:17, 8 March 2023 Thope talk contribs uploaded File:B6025-025.png (File uploaded with MsUpload)
- 08:57, 8 March 2023 Thope talk contribs created page File:BW6-009.png (File uploaded with MsUpload)
- 08:57, 8 March 2023 Thope talk contribs uploaded File:BW6-009.png (File uploaded with MsUpload)
- 08:57, 28 February 2023 Thope talk contribs created page File:SuperEdi.png (File uploaded with MsUpload)
- 08:57, 28 February 2023 Thope talk contribs uploaded File:SuperEdi.png (File uploaded with MsUpload)
- 13:38, 27 February 2023 Thope talk contribs created page File:TPE02819-2.jpg (File uploaded with MsUpload)
- 13:38, 27 February 2023 Thope talk contribs uploaded File:TPE02819-2.jpg (File uploaded with MsUpload)
- 12:20, 25 February 2023 Thope talk contribs created page File:BeamScatter4.png (File uploaded with MsUpload)
- 12:20, 25 February 2023 Thope talk contribs uploaded File:BeamScatter4.png (File uploaded with MsUpload)
- 12:19, 25 February 2023 Thope talk contribs uploaded a new version of File:BeamScatter2.png (File uploaded with MsUpload)
- 11:04, 25 February 2023 Thope talk contribs created page File:BeamScatter3.png (File uploaded with MsUpload)
- 11:04, 25 February 2023 Thope talk contribs uploaded File:BeamScatter3.png (File uploaded with MsUpload)
- 09:54, 25 February 2023 Thope talk contribs created page File:BEAMER 6.png (File uploaded with MsUpload)
- 09:54, 25 February 2023 Thope talk contribs uploaded File:BEAMER 6.png (File uploaded with MsUpload)
- 09:54, 25 February 2023 Thope talk contribs created page File:BEAMER 5.png (File uploaded with MsUpload)
- 09:54, 25 February 2023 Thope talk contribs uploaded File:BEAMER 5.png (File uploaded with MsUpload)
- 09:41, 25 February 2023 Thope talk contribs created page File:BEAMER 4.png (File uploaded with MsUpload)
- 09:40, 25 February 2023 Thope talk contribs uploaded File:BEAMER 4.png (File uploaded with MsUpload)
- 09:40, 25 February 2023 Thope talk contribs created page File:BEAMER 3.png (File uploaded with MsUpload)
- 09:40, 25 February 2023 Thope talk contribs uploaded File:BEAMER 3.png (File uploaded with MsUpload)
- 09:25, 25 February 2023 Thope talk contribs created page File:BEAMER 2.png (File uploaded with MsUpload)
- 09:25, 25 February 2023 Thope talk contribs uploaded File:BEAMER 2.png (File uploaded with MsUpload)
- 09:25, 25 February 2023 Thope talk contribs created page File:BEAMER 1.png (File uploaded with MsUpload)
- 09:25, 25 February 2023 Thope talk contribs uploaded File:BEAMER 1.png (File uploaded with MsUpload)
- 12:25, 23 February 2023 Thope talk contribs created page File:9500shot2.png (File uploaded with MsUpload)
- 12:25, 23 February 2023 Thope talk contribs uploaded File:9500shot2.png (File uploaded with MsUpload)
- 12:25, 23 February 2023 Thope talk contribs created page File:9500shot3.png (File uploaded with MsUpload)
- 12:25, 23 February 2023 Thope talk contribs uploaded File:9500shot3.png (File uploaded with MsUpload)
- 12:25, 23 February 2023 Thope talk contribs created page File:9500shot1.png (File uploaded with MsUpload)
- 12:25, 23 February 2023 Thope talk contribs uploaded File:9500shot1.png (File uploaded with MsUpload)
- 12:19, 23 February 2023 Thope talk contribs created page File:9500achk3.png (File uploaded with MsUpload)
