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- 14:02, 31 January 2023 Thope talk contribs uploaded File:9500MarkScan2.png (File uploaded with MsUpload)
- 13:55, 31 January 2023 Mfarin talk contribs created page File:Bitmapddddd.jpg (File uploaded with MsUpload)
- 13:55, 31 January 2023 Mfarin talk contribs uploaded File:Bitmapddddd.jpg (File uploaded with MsUpload)
- 13:55, 31 January 2023 Mfarin talk contribs created page File:Holes.tif.jpg (File uploaded with MsUpload)
- 13:55, 31 January 2023 Mfarin talk contribs uploaded File:Holes.tif.jpg (File uploaded with MsUpload)
- 13:41, 31 January 2023 Jehan talk contribs created page File:Dicing Work Sheet v2.docx
- 13:41, 31 January 2023 Jehan talk contribs uploaded File:Dicing Work Sheet v2.docx
- 12:38, 31 January 2023 Thope talk contribs created page File:RoughFineScan2.png (File uploaded with MsUpload)
- 12:38, 31 January 2023 Thope talk contribs uploaded File:RoughFineScan2.png (File uploaded with MsUpload)
- 12:36, 31 January 2023 Thope talk contribs uploaded a new version of File:RoughFineScan.png (File uploaded with MsUpload)
- 12:25, 31 January 2023 Thope talk contribs created page File:9500MarkScan.png (File uploaded with MsUpload)
- 12:25, 31 January 2023 Thope talk contribs uploaded File:9500MarkScan.png (File uploaded with MsUpload)
- 12:23, 31 January 2023 Mfarin talk contribs created page File:Pillar 0C+S-RIE Al2O3 08bbbb.jpg (File uploaded with MsUpload)
- 12:23, 31 January 2023 Mfarin talk contribs uploaded File:Pillar 0C+S-RIE Al2O3 08bbbb.jpg (File uploaded with MsUpload)
- 12:23, 31 January 2023 Mfarin talk contribs created page File:Pillar 0C+S-RIE Al2O3 02bbbb.jpg (File uploaded with MsUpload)
- 12:23, 31 January 2023 Mfarin talk contribs uploaded File:Pillar 0C+S-RIE Al2O3 02bbbb.jpg (File uploaded with MsUpload)
- 12:02, 31 January 2023 Thope talk contribs created page File:9500MarkExposure.png (File uploaded with MsUpload)
- 12:02, 31 January 2023 Thope talk contribs uploaded File:9500MarkExposure.png (File uploaded with MsUpload)
- 11:30, 31 January 2023 Mfarin talk contribs created page File:Esq met Al2O3 compact.jpg (File uploaded with MsUpload)
- 11:30, 31 January 2023 Mfarin talk contribs uploaded File:Esq met Al2O3 compact.jpg (File uploaded with MsUpload)
- 11:18, 31 January 2023 Mfarin talk contribs created page File:Esq met Al2O3 only (1).png (File uploaded with MsUpload)
- 11:18, 31 January 2023 Mfarin talk contribs uploaded File:Esq met Al2O3 only (1).png (File uploaded with MsUpload)
- 11:17, 31 January 2023 Jehem talk contribs created page Specific Process Knowledge/Lithography/TIspray (Created page with "{{:Specific Process Knowledge/Lithography/authors_generic}} '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/5214E click here]''' Resist AZ 5214E __TOC__ =Resist Description= TI Spray is specifically designed to be used for spray coating, and is a positive UV photoresist with image revers...")
- 11:15, 31 January 2023 Mfarin talk contribs created page File:Esq met Al2O3 only.png (File uploaded with MsUpload)
- 11:15, 31 January 2023 Mfarin talk contribs uploaded File:Esq met Al2O3 only.png (File uploaded with MsUpload)
- 11:06, 31 January 2023 Jmli talk contribs created page Template:Nexsa-addpubrow (Created page with "| [https://labmanager.dtu.dk/view_binary.php?fileId={{{LMdocID}}} {{{LMdocTitle}}} |{{{LMdocType}}} |{{{LMdocAuthor}}} |{{{docLink}}} |{{{XPSused}}} |{{{UPSused}}} |{{{ISSused}}} |{{{REELSused}}} |{{{Ramanused}}} |{{{AdditionalOption}}} |{{{Sample}}} |{{{Abstract}}} |-")
- 11:03, 31 January 2023 Thope talk contribs created page File:BoundingBoxAlign.png (File uploaded with MsUpload)
- 11:03, 31 January 2023 Thope talk contribs uploaded File:BoundingBoxAlign.png (File uploaded with MsUpload)
- 11:01, 31 January 2023 Jehem talk contribs uploaded a new version of File:AZ photoresists spectral sensitivity - remake v1.png
- 10:57, 31 January 2023 Jmli talk contribs created page Template:Nexsa-tableheader (Created page with "{| border="2" cellspacing="0" cellpadding="1" {{table}} | align="center" style="background:#f0f0f0;" colspan="4"|'''Publication''' | align="center" style="background:#f0f0f0;" colspan="6"|'''Techniques and hardware applied''' | align="center" style="background:#f0f0f0;" rowspan="2"|'''Sample types/Materials''' | align="center" style="background:#f0f0f0;" rowspan="2"|'''Abstract: Hover cursor to show''' |- | align="center" style="background:#f0f0f0;" |'''Title (The link r...")
- 09:43, 31 January 2023 Thope talk contribs created page File:BoundingBox.png (File uploaded with MsUpload)
- 09:43, 31 January 2023 Thope talk contribs uploaded File:BoundingBox.png (File uploaded with MsUpload)
- 09:39, 31 January 2023 Jehem talk contribs created page Specific Process Knowledge/Lithography/authors generic (Created page with "''This section is written by DTU Nanolab staff, unless otherwise stated.''")
- 08:02, 31 January 2023 Jmli talk contribs created page Template:Author-jmli1 (Created page with "''This page was written by Jonas Michael-Lindhard, DTU Nanolab ''<br>")
- 16:25, 30 January 2023 Thope talk contribs created page File:RoughFineScan.png (File uploaded with MsUpload)
- 16:25, 30 January 2023 Thope talk contribs uploaded File:RoughFineScan.png (File uploaded with MsUpload)
- 15:43, 30 January 2023 Thope talk contribs created page File:9500AlignmentMarks.png (File uploaded with MsUpload)
- 15:43, 30 January 2023 Thope talk contribs uploaded File:9500AlignmentMarks.png (File uploaded with MsUpload)
- 15:13, 30 January 2023 Indiogo talk contribs created page File:Dissertation ID Rapid Thermal Processing and its Effects on High Aspect Ratio Silicon Features.pdf (File uploaded with MsUpload)
- 15:13, 30 January 2023 Indiogo talk contribs uploaded File:Dissertation ID Rapid Thermal Processing and its Effects on High Aspect Ratio Silicon Features.pdf (File uploaded with MsUpload)
- 15:13, 30 January 2023 Indiogo talk contribs created page File:Report Annealsys 2022.pdf (File uploaded with MsUpload)
- 15:13, 30 January 2023 Indiogo talk contribs uploaded File:Report Annealsys 2022.pdf (File uploaded with MsUpload)
- 14:46, 30 January 2023 Thope talk contribs created page File:JEOL9500Alignment.png (File uploaded with MsUpload)
- 14:46, 30 January 2023 Thope talk contribs uploaded File:JEOL9500Alignment.png (File uploaded with MsUpload)
- 11:27, 30 January 2023 Thope talk contribs created page Specific Process Knowledge/Lithography/EBeamLithography/RaithPatternPreparation (Created page with "= Pattern preparation for exposure on the Raith eLine Plus =")
- 11:26, 30 January 2023 Thope talk contribs created page Specific Process Knowledge/Lithography/EBeamLithography/JEOLPatternPreparation (Created page with "=Pattern preparation for exposure on JEOL 9500 =")
- 11:08, 30 January 2023 Bghe talk contribs deleted page Specific Process Knowledge/Lithography/EBeamLithography/Developer E-beam (Request from Thomas Pedersen)
- 10:52, 30 January 2023 Jehem talk contribs created page Specific Process Knowledge/Lithography/Development/DUV developer (Created page with "=Developer: TMAH Stepper = 300x300px|right|thumb|The Developer-TMAH-Stepper is placed in F-3 This developer is dedicated for development of DUV resists. The developer is fully automatic and can run up to 25 substrates in a batch 4", 6", and 8" size (8" requires tool change). The machine is equipped with 1 developer line, in our case 2,38% TMAH in water (AZ 726 MIF), 1 topside rinse line with water, 1 backside rinse line with water and 1 N2 line f...")
- 10:28, 30 January 2023 Jehem talk contribs created page Specific Process Knowledge/Lithography/Coaters/Spin Coater: Gamma DUV processing (Created page with "=General Process Information= Processing using Spin Coater: Süss stepper is divided into two parts: *Spin coating *Soft baking ==Spin coating== The process of spin coating on Spin Coater: GSüss stepper consists of a selection of the following steps: *Acceleration to a low spin speed if dynamic dispense is used *Resist dispense *Spin-off The wafer is first centered on the spindle chuck and held in place by vacuum. If static dispense is specified in the process, the sp...")
- 10:27, 30 January 2023 Indiogo talk contribs created page File:Test samples.png
.png){kind=link}
