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14:53, 2 January 2023 Eves talk contribs uploaded File:Eves W DEP rec HiPIMS 20mu no kick shutter 20221229.png (File uploaded with MsUpload)
14:53, 2 January 2023 Eves talk contribs created page File:Eves W DEP rec HiPIMS 20mu no kick reprate 20221229.png (File uploaded with MsUpload)
14:53, 2 January 2023 Eves talk contribs uploaded File:Eves W DEP rec HiPIMS 20mu no kick reprate 20221229.png (File uploaded with MsUpload)
14:53, 2 January 2023 Eves talk contribs created page File:Eves W DEP rec HiPIMS 20mu no kick pressure 20221229.png (File uploaded with MsUpload)
14:53, 2 January 2023 Eves talk contribs uploaded File:Eves W DEP rec HiPIMS 20mu no kick pressure 20221229.png (File uploaded with MsUpload)
14:53, 2 January 2023 Eves talk contribs created page File:Eves W DEP rec HiPIMS 20mu no kick power 20221229.png (File uploaded with MsUpload)
14:53, 2 January 2023 Eves talk contribs uploaded File:Eves W DEP rec HiPIMS 20mu no kick power 20221229.png (File uploaded with MsUpload)
14:53, 2 January 2023 Eves talk contribs created page File:Eves W DEP rec HiPIMS 20mu no kick flow 20221229.png (File uploaded with MsUpload)
14:53, 2 January 2023 Eves talk contribs uploaded File:Eves W DEP rec HiPIMS 20mu no kick flow 20221229.png (File uploaded with MsUpload)
14:53, 2 January 2023 Eves talk contribs created page File:Eves W DEP rec HiPIMS 20mu no kick current 20221229.png (File uploaded with MsUpload)
14:53, 2 January 2023 Eves talk contribs uploaded File:Eves W DEP rec HiPIMS 20mu no kick current 20221229.png (File uploaded with MsUpload)
14:53, 2 January 2023 Eves talk contribs created page File:Eves HiPIMS W sample model.png (File uploaded with MsUpload)
14:53, 2 January 2023 Eves talk contribs uploaded File:Eves HiPIMS W sample model.png (File uploaded with MsUpload)
14:53, 2 January 2023 Eves talk contribs created page File:Eves HiPIMS Voltage Kick char 20230102.png (File uploaded with MsUpload)
14:53, 2 January 2023 Eves talk contribs uploaded File:Eves HiPIMS Voltage Kick char 20230102.png (File uploaded with MsUpload)
14:53, 2 January 2023 Eves talk contribs created page File:Eves HiPIMS Voltage Current char 20230102.png (File uploaded with MsUpload)
14:53, 2 January 2023 Eves talk contribs uploaded File:Eves HiPIMS Voltage Current char 20230102.png (File uploaded with MsUpload)
14:53, 2 January 2023 Eves talk contribs created page File:Eves W XRR HiPIMS 30mu with kick 20221229.png (File uploaded with MsUpload)
14:53, 2 January 2023 Eves talk contribs uploaded File:Eves W XRR HiPIMS 30mu with kick 20221229.png (File uploaded with MsUpload)
14:51, 2 January 2023 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Tungsten/DC Sputtering of W in Sputter-system Metal-Nitride (PC3) (Created page with "=W Sputtering= This page presents the results of W deposition using DC sputtering in Sputter-System Metal-Nitride(PC3), now commonly known as "Cluster Lesker". The deposition target is bonded W. Source #3 (DC/p-DC/HiPIMS) was used. The fabrication and characterization described below were conducted in 2022 by Evgeniy Shkondin, DTU Nanolab. The prepared samples were investigated by the X-ray Reflectivity method. The focus of the study was the depos...")
14:51, 2 January 2023 Eves talk contribs created page File:Eves W PC3Src3DC 20221228.png (File uploaded with MsUpload)
14:51, 2 January 2023 Eves talk contribs uploaded File:Eves W PC3Src3DC 20221228.png (File uploaded with MsUpload)
14:51, 2 January 2023 Eves talk contribs created page File:Eves W PC3Src3DC sample model 20221228.png (File uploaded with MsUpload)
14:51, 2 January 2023 Eves talk contribs uploaded File:Eves W PC3Src3DC sample model 20221228.png (File uploaded with MsUpload)
14:50, 2 January 2023 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Tungsten/DC Sputtering of W in Sputter-System (Lesker) (Created page with "=W Sputtering= This page presents the results of W deposition using DC sputtering in Sputter-System Lesker, now commonly known as "Old Lesker". The deposition target is W. Source #3 (DC) was used. The fabrication and characterization described below were conducted in 2022 by Evgeniy Shkondin, DTU Nanolab. The prepared samples were investigated by the X-ray Reflectivity method. The focus of the study was the deposition conditions. The process re...")
14:50, 2 January 2023 Eves talk contribs created page File:Eves W old Lesker 20221228.png (File uploaded with MsUpload)
14:50, 2 January 2023 Eves talk contribs uploaded File:Eves W old Lesker 20221228.png (File uploaded with MsUpload)
14:49, 2 January 2023 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Tungsten/Evaporation of W in Temescal (Created page with "=Deposition of W in Temescal= During the e-beam deposition of Tungsten, extremely bright light and heat are generated! Lower density film than expected due to porosity. Consider using sputtering instead. Power 33W, stable rate, tooling 86%. Measured thickness 20 nm (XRR). Wait for base pressure 3 10-7Torr before start. {| border="2" cellspacing="2" cellpadding="2" colspan="3" |bgcolor="#98FB98" |'''Deposition of Tungsten. Dep. rate: 0.5Å/s, Thickness sp.:...")
14:49, 2 January 2023 Eves talk contribs created page File:Eves 20220225 W Temescal.png (File uploaded with MsUpload)
14:49, 2 January 2023 Eves talk contribs uploaded File:Eves 20220225 W Temescal.png (File uploaded with MsUpload)
14:35, 2 January 2023 User account S183553 talk contribs was created automatically
14:04, 2 January 2023 User account Tsest talk contribs was created automatically
09:23, 2 January 2023 User account S183776 talk contribs was created automatically
14:36, 23 December 2022 Eves talk contribs created page Specific Process Knowledge/Thin film deposition/Deposition of Aluminium/Al Sputtering in Cluster Lesker PC3 (Created page with "This page presents the results of Al deposition using DC sputtering in Sputter-system Metal-Nitride (PC3), now commonly known as "Cluster Lesker". The deposition target is Al 3-inch. Source #2 (DC/p-DC) was used. The fabrication and characterization described below were conducted in 2022 by Evgeniy Shkondin, DTU Nanolab. The focus of the study was the deposition conditions. The prepared samples were investigated by the X-ray Reflectivity method. The process recipe is...")
14:32, 23 December 2022 Eves talk contribs created page File:Eves Al PC3 Src2 DC A10 3 20221013.png (File uploaded with MsUpload)
14:32, 23 December 2022 Eves talk contribs uploaded File:Eves Al PC3 Src2 DC A10 3 20221013.png (File uploaded with MsUpload)
14:32, 23 December 2022 Eves talk contribs created page File:Eves Al PC3 Src2 DC A10 2 20221013.png (File uploaded with MsUpload)
14:32, 23 December 2022 Eves talk contribs uploaded File:Eves Al PC3 Src2 DC A10 2 20221013.png (File uploaded with MsUpload)
14:32, 23 December 2022 Eves talk contribs created page File:Eves Al PC3 Src2 DC A10 1 20221013.png (File uploaded with MsUpload)
14:32, 23 December 2022 Eves talk contribs uploaded File:Eves Al PC3 Src2 DC A10 1 20221013.png (File uploaded with MsUpload)
14:32, 23 December 2022 Eves talk contribs created page File:Eves Al PC3 Src2 DC A9 4 20221013.png (File uploaded with MsUpload)
14:32, 23 December 2022 Eves talk contribs uploaded File:Eves Al PC3 Src2 DC A9 4 20221013.png (File uploaded with MsUpload)
14:32, 23 December 2022 Eves talk contribs created page File:Eves Al PC3 Src2 DC A9 3 20221013.png (File uploaded with MsUpload)
14:32, 23 December 2022 Eves talk contribs uploaded File:Eves Al PC3 Src2 DC A9 3 20221013.png (File uploaded with MsUpload)
14:32, 23 December 2022 Eves talk contribs created page File:Eves Al PC3 Src2 DC A9 2 20221013.png (File uploaded with MsUpload)
14:32, 23 December 2022 Eves talk contribs uploaded File:Eves Al PC3 Src2 DC A9 2 20221013.png (File uploaded with MsUpload)
14:32, 23 December 2022 Eves talk contribs created page File:Eves Al PC3 Src2 DC A9 1 20221013.png (File uploaded with MsUpload)
14:32, 23 December 2022 Eves talk contribs uploaded File:Eves Al PC3 Src2 DC A9 1 20221013.png (File uploaded with MsUpload)
14:32, 23 December 2022 Eves talk contribs created page File:Eves Al PC3 Src2 DC A8 4 20221013.png (File uploaded with MsUpload)
14:32, 23 December 2022 Eves talk contribs uploaded File:Eves Al PC3 Src2 DC A8 4 20221013.png (File uploaded with MsUpload)