Deletion log
Below is a list of the most recent deletions.
- 13:40, 24 March 2020 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of NiFe/Sputtering of NiFe in the Lesker sputter system (content before blanking was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_NiFe/Sputterin...")
- 10:41, 20 March 2020 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Al Si (By request from Rebecca)
- 15:00, 19 March 2020 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Multisource PVD (request from Rebecca)
- 08:58, 17 March 2020 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Aluminium/Comparison of roughness and other surface characteristics for different methods of Aluminium deposition (content before blanking was: " The surface of an Al thin film was checked with AFM. '''Thermal deposition''' In Wordentec Al can be deposited by using thermal evaporation. The AFM image shown below is recorded on such a film. It shows that the sur...")
- 08:36, 17 March 2020 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Alcatel (content before blanking was: "'''Feedback to this page''': '''[mailto:pvd@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/Thin_film_deposition/Alcatel&action=edit click her...")
- 08:36, 17 March 2020 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/III-V Dielectric evaporator (Author request: content before blanking was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/Thin_film_deposition/III-V_D...)
- 09:02, 21 February 2020 Bghe talk contribs deleted page Thick layers (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Thick_layers click here]''' '''Thicker layers''' Practical experience has shown that at s...")
- 12:04, 7 February 2020 Bghe talk contribs deleted page SiO2 DOE (content before blanking was: "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/III_V_RIE_ETCHES/SiO2_DOE click here]''' =...")
- 08:30, 12 September 2019 Bghe talk contribs deleted page LabAdviser/New equipment in the pipeline and Old equipment for decommissioning (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/LabAdviser/New_equipment_in_the_pipeline_and_Old_equipment_for_decommissioning click here]''...")
- 13:52, 22 August 2019 Bghe talk contribs deleted page Specific Process Knowledge/Lithography/Pattern Design and Mask Fabrication/CleWin (content before blanking was: "<!-- =<span style="background:#FF2800">THIS PAGE IS UNDER RE-CONSTRUCTION</span>200px= --> '''Feedback to this page''': '''[mailto:danchipsupport@danchip.dtu.dk?Subject=Feed%20back%20fro...")
- 11:15, 22 August 2019 Bghe talk contribs deleted page Specific Process Knowledge/Lithography/Pattern Design and Mask Fabrication (content before blanking was: "= Pattern Design and Mask Fabrication = '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Lithograp...")
- 14:50, 20 August 2019 Bghe talk contribs deleted page Specific Process Knowledge/Thermal Process/C1 Anneal Oxide furnace (content was: "#REDIRECT Specific Process Knowledge/Thermal Process/C2 Gate Oxide furnace" (and the only contributor was "Pvl"))
- 14:50, 20 August 2019 Bghe talk contribs deleted page Specific Process Knowledge/Thermal Process/C2 Furnace Anneal Oxide (Author request: Equipment is decommissioned)
- 09:13, 26 June 2019 Bghe talk contribs deleted page Specific Process Knowledge/Etch/Comparison (A similar page is elsewhere)
- 13:11, 1 March 2019 Bghe talk contribs deleted page Specific Process Knowledge/Pattern Design/CleWin (Author request: by Jesper 2019-02-22)
- 09:50, 31 October 2018 Bghe talk contribs deleted page Specific Process Knowledge/Characterization/SEM FEI Nova 600 NanoSEM/Image Gallery (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowle..." (and the only contributor was "Hoal"))
- 09:50, 31 October 2018 Bghe talk contribs deleted page Specific Process Knowledge/Characterization/Tecnai TEM/TEM (content was: "'''Bright Field:''' <br\> In this mode the contrast formation is formed directly by absorption and scattering of electrons in the sample. Thicker regions of the sample,..." (and the only contributor was "Wihu"))
- 09:49, 31 October 2018 Bghe talk contribs deleted page Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy/FEI (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledg..." (and the only contributor was "Jml"))
- 09:47, 31 October 2018 Bghe talk contribs deleted page Specific Process Knowledge/CEN/Sample Holders (content was: "=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>200px= '''Feedback to this page''': '''[mailto:labadviser@danc..." (and the only contributor was "Bghe"))
- 13:21, 26 October 2018 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Aluminium Nitride/AlN in PVD co-sputter/Setting 4 (content before blanking was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Aluminiu...")
- 07:43, 18 October 2018 Bghe talk contribs deleted page Specific Process Knowledge/Back-end processing/Mask making (content was: "'''Feedback to this page''': '''[mailto:danchipsupport@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_Process_Knowledge/Back-end_processing/Mask_making click here]''' <!-- Rep...")
- 07:38, 18 October 2018 Bghe talk contribs deleted page Specific Process Knowledge/Lithography/DUVStepperLithography/Process Flow (content was: "The SÜSS Spinner-Stepper is dedicated for spinning DUV resists. Please note that a Bottom Anti-Reflective Coating (BARC) is necessary to guarantee high quality of bo..." (and the only contributor was "Makei"))
- 10:25, 16 August 2018 Bghe talk contribs deleted page Technology Research/Fabrication of Hyperbolic Metamaterials using Atomic Layer Deposition/Procces flow (content was: "====Procces flow description==== The substrates for the samples were fabricated by depositing 1 μm of Si<sub>3</sub>N<sub>4</sub> (the resonator layer) on 100 mm sili..." (and the only contributor was "Eves"))
- 14:30, 15 August 2018 Bghe talk contribs deleted page Reticle Design (content was: "trert" (and the only contributor was "Makei"))
- 14:22, 15 August 2018 Bghe talk contribs deleted page Specific Process Knowledge/Lithography/UVExposure/travka (content was: "delete me!!")
- 14:56, 13 August 2018 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Silicon/Si sputter Alcatel (content was: " ===<span style="color:Red">This machine is no longer used for sputtering process</span>=== == Sputtered Silicon in the Alcatel== This process is not running stable nowadays so we recommend you to consider other Si deposition processe...")
- 14:55, 13 August 2018 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of NiCr/Deposition parameters NiCr (content was: "==<span style="color:Red"> The machine will be decommissioned soon</span>== '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php?title=Specific_...")
- 14:55, 13 August 2018 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of Silicon Oxide/Deposition of Silicon Oxide using Lesker sputter tool (content was: "'''Feedback to this page''': '''[mailto:danchipsupport@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Silicon_Oxide/Deposition_o...")
- 14:55, 13 August 2018 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of TiW/Sputtering of TiW in Wordentec/Grain size and uniformity of TiW layers (content was: "For the sputter process, the effect and argon pressure can be set to different values. Depending on the process parameters, the deposited layers will have different characteristics: the roughness, grain size and uniformity may be differn...")
- 14:17, 13 August 2018 Bghe talk contribs deleted page Specific Process Knowledge/Etch/DRIE-Pegasus/Advanced Processing (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowle..." (and the only contributor was "Bghe"))
- 14:13, 13 August 2018 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of MgB/MgB in PVD co-sputter (content was: "=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>200px= '''Feedback to this page''': '''[mailto:labadviser@..." (and the only contributor was "Paphol"))
- 13:04, 20 July 2018 Bghe talk contribs deleted page LabAdviser/Technology Research/Nanoscale characterization of ultra-thin metal films for nanofabrication applications/Transmission Kikuchi diffraction (content before blanking was: "A. B. da Silva Fanta, M. Todeschini, A. Burrows, H. Jansen, C. D. Damsgaard, H. Alimadadi, and J. B. Wagner Materials Characterization, vol. 139, pp. 452-462, 2018.")
- 11:41, 12 March 2018 Bghe talk contribs deleted page Quick check list for EBSD measurement (was placed outside folder structure)
- 11:32, 12 March 2018 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Leybold (No æonger in the cleanroom)
- 11:02, 12 March 2018 Bghe talk contribs deleted page Specific Process Knowledge/Characterization/SEM Zeiss Supra 60VP (According to PEVO)
- 11:01, 12 March 2018 Bghe talk contribs deleted page Specific Process Knowledge/Characterization/SEM Zeiss (according to PEVO)
- 11:00, 12 March 2018 Bghe talk contribs deleted page Specific Process Knowledge/III-V Process/photolithography (content was: "'''Feedback to this page''': '''[mailto:photolith@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge..." (and the only contributor was "Jml"))
- 10:58, 12 March 2018 Bghe talk contribs deleted page Specific Process Knowledge/Lithography/CoatersNEW (TARAN asked for it to be deleted)
- 10:54, 12 March 2018 Bghe talk contribs deleted page Specific Process Knowledge/Thin film deposition/Deposition of AlTi/Deposition parameters AlTi (system on at Danchip anymore)
- 14:48, 22 January 2018 Bghe talk contribs deleted page Usergroup:DANCHIP (content was: "* BGE" (and the only contributor was "WikiSysop"))
- 09:05, 20 November 2017 Bghe talk contribs deleted page LabAdviser/Technology Research/Frontier Studies of Metal Thin Films - Deposition and Characterization (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/LabAdviser/Technology_R..." (and the only contributor was "Bghe"))
- 12:59, 26 October 2017 Bghe talk contribs deleted page High resolution patterning with HSQ (content was: "* ''This work was done by Bingdong Chang and Xiaoli Zhu in 2016;'' * ''This page was edited by Bingdong Chang 23 October 2017.'' High resolution patterns (sub-10n..." (and the only contributor was "Bincha"))
- 12:39, 26 October 2017 Bghe talk contribs deleted page Using OES to monitor etch process (content was: "''* This work was done by Henri Jansen and Bingdong Chang in 2017;'' ''* This page was edited by Bingdong Chang 23 October 2017.'' An optical endpoint detection ..." (and the only contributor was "Bincha"))
- 12:38, 26 October 2017 Bghe talk contribs deleted page Etch black silicon (content was: "* ''This work was done by Henri Jansen and Bingdong Chang in 2017;'' * ''This page was edited by Bingdong Chang 23 October, 2017.'' Black silicon has a modified ..." (and the only contributor was "Bincha"))
- 12:37, 26 October 2017 Bghe talk contribs deleted page Etch 3 dimensional silicon microstructures (content was: "* ''This work was done by Henri Jansen and Bingdong Chang in 2017;'' * ''This page was last edited by Bingdong Chang 24 October 2017.'' By combining anisotropic..." (and the only contributor was "Bincha"))
- 12:35, 26 October 2017 Bghe talk contribs deleted page Etch high aspect ratio silicon microstructures (content was: " By performing a finely tuned process, which is called '''DREM process''' (Deposit, Removal, Etch Method), an infinite etch selectivity can be achieved with convent..." (and the only contributor was "Bincha"))
- 15:46, 13 September 2017 Jehan talk contribs deleted page File:CleWin5UserGuide.pdf (Deleted old revision 20170913141448!CleWin5UserGuide.pdf: LabAdviser did not get the new file)
- 08:06, 10 July 2017 Bghe talk contribs deleted page Specific Process Knowledge/Etch/KOH Etch/V-grooves (content was: "'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/KOH_Etch/V-grooves click here]'''")
- 08:05, 10 July 2017 Bghe talk contribs deleted page Specific Process Knowledge/Lithography/UVExposure/UVExposure dose (content was: "=This page is under construction 70px= =Exposure dose= Image:AZ spectral sensitivity.gif|300x300px|thumb|Spectral sensitiv..." (and the only contributor was "Taran"))
- 07:41, 29 June 2017 Bghe talk contribs deleted page Specific Process Knowledge/Characterization/SEM FEI Nova 600 NanoSEM/Nova-Gallery (content was: "ARGUS images" (and the only contributor was "Hoal"))