Specific Process Knowledge/Thin film deposition

From LabAdviser

Choose material to deposit

Metals

  • Aluminium
  • Gold
  • Titanium
  • Nickel

Polymers

  • SU8

Other materials

  • PolySilicon
  • Silicon Oxide
  • Silicon Nitride


Choose deposition equipment

  • Alcatel - E-beam evaporator and sputter tool
  • Leybold - E-beam evaporator and multiple wafer tool
  • Wordentec - Metal evaporator and ?
  • PECVD - Plasma Enhanced Chemical Vapor deposition
  • B2 Furnace LPCVD Nitride - Deposition of silicon nitrid
  • B3 Furnace LPCVD TEOS - Deposition of silicon oxide
  • B4 Furnace LPCVD PolySilicon - Deposition of polysilicon
  • MVD - Molecular Vapor Deposition
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