Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using ASE/More test with CF4/H2, CHF3 and C4F8/H2 - SiO2 etch

From LabAdviser

< Specific Process Knowledge‎ | Etch‎ | Etching of Silicon Oxide‎ | SiO2 etch using ASE

Revision as of 13:48, 3 October 2023 by Mfarin (talk | contribs) (Created page with "More test with CF4/H2, CHF3 and C4F8/H2 - SiO2 etch")

(diff) ← Older revision | Latest revision (diff) | Newer revision → (diff)

Jump to navigation Jump to search

More test with CF4/H2, CHF3 and C4F8/H2 - SiO2 etch

Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/Etching_of_Silicon_Oxide/SiO2_etch_using_ASE/More_test_with_CF4/H2,_CHF3_and_C4F8/H2_-_SiO2_etch&oldid=47749"