Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic

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Mediumiso

Recipe	Step	Temperature	Pressure	C4F8	SF6	O2	Ar	Coil	Platen	Runs	Key words
Mediumiso1	-	20	25	0	150	0	0	600	3	1	Works great. Used extensively for Ph.D. thesis of Peter Emil Larsen
Isoslow7	-	10	10	0	80	0	0	150	3	1
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sand box

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