Template:Spinning Track1

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Revision as of 12:58, 1 November 2007 by Elk (talk | contribs) (New page: Use Trak1 and find the recipe you will use. Choose from the list: *PR1_5 for 1,5 um resist thickness *PR2_2 for 2,2 um resist thickness *PR4_2 for 4,2 um resist thickness If you want to se...)
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Use Trak1 and find the recipe you will use. Choose from the list:

  • PR1_5 for 1,5 um resist thickness
  • PR2_2 for 2,2 um resist thickness
  • PR4_2 for 4,2 um resist thickness

If you want to see parameters for those spins please refer to this document: